Adhesion Aspects in MEMS/NEMS: 1st Edition (Hardback) book cover

Adhesion Aspects in MEMS/NEMS

1st Edition

Edited by Seong H. Kim, Michael T. Dugger, Kash L. Mittal

CRC Press

410 pages

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pub: 2011-02-18
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Description

Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects owing to their small size and limited actuation force that can be generated. Extension of MEMS technology concepts to the nanoscale and development of NanoElectroMechanicalSystems(NEMS) will result in systems even more strongly influenced by surface forces. The book is divided into five parts as follows: Part 1: Understanding Through Continuum Theory; Part 2: Computer Simulation of Interfaces; Part 3: Adhesion and Friction Measurements; Part 4: Adhesion in Practical Applications; and Part 5: Adhesion Mitigation Strategies. This compilation constitutes the first book on this extremely important topic in the burgeoning field of MEMS/NEMS. It is obvious from the topics covered in this book that bountiful information is contained here covering understanding of surface forces and adhesion as well as novel ways to mitigate adhesion in MEMS/NEMS. This book should be of great interest to anyone engaged in the wonderful and fascinating field of MEMS/NEMS, as it captures the current R&D activity.

Table of Contents

Preface Part 1: Understanding Through Continuum Theory Numerical Analysis of Contact Mechanics between a Spherical Slider and a Flat Disk with Low Roughness Considering Lennard–Jones Surface Forces K. Ono Equilibrium Vapor Adsorption and Capillary Force: Exact Laplace–Young Equation Solution and Circular Approximation Approaches D. B. Asay, M. P. de Boer and S. H. Kim Which Fractal Parameter Contributes Most to Adhesion? D.-L. Liu, J. Martin and N. A. Burnham Effects of Contacting Surfaces on MEMS Device Reliability Y. Du, W. A. de Groot, L. Kogut, Y. J. Tung and E. P. Gusev A van der Waals Force-Based Adhesion Model for Micromanipulation S. Alvo, P. Lambert, M. Gauthier and S. Régnier Part 2: Computer Simulation of Interfaces Lattice Gas Monte Carlo Simulation of Capillary Forces in Atomic Force Microscopy J. Jang and G. C. Schatz Large Scale Molecular Dynamics Simulations of Vapor Phase Lubrication for MEMS C. D. Lorenz, M. Chandross and G. S. Grest Atomistic Factors Governing Adhesion between Diamond, Amorphous Carbon and Model Diamond Nanocomposite Surfaces P. L. Piotrowski, R. J. Cannara, G. Gao, J. J. Urban, R. W. Carpick and J. A. Harrison Part 3: Adhesion and Friction Measurements Theoretical and Experimental Study of the Influence of AFM Tip Geometry and Orientation on Capillary Force A. Chau, S. Régnier, A. Delchambre and P. Lambert Odd–Even Effects in the Friction of Self-Assembled Monolayers of Phenyl-Terminated Alkanethiols in Contacts of Different Adhesion Strengths Y. Yang, A. C. Jamison, D. Barriet, T. R. Lee and M. Ruths The Pull-Off Force and the Work of Adhesion: New Challenges at the Nanoscale N. W. Moore and J. E. Houston Interfacial Adhesion between Rough Surfaces of Polycrystalline Siliconand Its Implications for M/NEMS Technology I. Laboriante, B. Bush, D. Lee, F. Liu, T.-J. K. Liu, C. Carraro and R. Maboudian Effect of Air–Plasma Pre-treatment of Si Substrate on Adhesion Strength and Tribological Properties of a UHMWPE Film M. Abdul Samad, N. Satyanarayana and S. K. Sinha Part 4: Adhesion in Practical Applications A Review of Adhesion in an Ohmic Microswitch G. G. Adams and N. E. McGruer Characterization of Gold–Gold Microcontact Behavior Using a Nanoindenter Based Setup K. W. Gilbert, S. Mall and K. D. Leedy Characterization and Adhesion of Interacting Surfaces in Capacitive RF MEMS Switches Undergoing Cycling S. M. Yeo, A. A. Polycarpou, S. I. Tseregounis, N. Tavassolian and J. Papapolymerou Molecular Mobility and Interfacial Dynamics in Organic Nano-electromechanical Systems (NEMS) S. E. Sills and R. M. Overney Part 5: Adhesion Mitigation Strategies Microscale Friction Reduction by Normal Force Modulation in MEMS W. M. van Spengen, G. H. C. J. Wijts, V. Turq and J. W. M. Frenken Microchannel Induced Surface Bulging of a Soft Elastomeric Layer A. Majumder, A. K. Tiwari, K. Korada and A. Ghatak Fabrication of Novel Superhydrophobic Surfaces and Water Droplet Bouncing Behavior —Part 1: Stable ZnO–PDMS Superhydrophobic Surface with Low Hysteresis Constructed Using ZnO Nanoparticles B.-B. Wang, J.-T. Feng, Y.-P. Zhao and T. X. Yu Plasma Modification of Polymer Surfaces and Their Utility in Building Biomedical Microdevices S. Bhattacharya, R. Kr. Singh, S. Mandal, A. Ghosh, S. Bok, V. Korampally, K. Gangopadhyay and S. Gangopadhyay

Subject Categories

BISAC Subject Codes/Headings:
SCI013050
SCIENCE / Chemistry / Physical & Theoretical