Microelectromechanical systems (MEMS) are evolving into highly integrated technologies for a variety of application areas. Add the biological dimension to the mix and a host of new problems and issues arise that require a broad understanding of aspects from basic, materials, and medical sciences in addition to engineering. Collecting the efforts of
Basic Bio-MEMS Fabrication Technologies. Microfluidic Devices and Components for Bio-MEMS. Bio-MEMS Applications and Systems.