Electrochemical Microsystem Technologies: 1st Edition (Hardback) book cover

Electrochemical Microsystem Technologies

1st Edition

Edited by J. Walter Schultze, Tetsuya Osaka, Madhav Datta

CRC Press

592 pages

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Hardback: 9780415273558
pub: 2002-09-05
eBook (VitalSource) : 9780429218873
pub: 2002-09-05
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Driven by the electronics industry, electrochemical technology has rapidly evolved, finding increasing applications in microelectronics, batteries, sensors, materials science, industrial fabrication, corrosion, microbiology, neurobiology and medicine. Electrochemical Microsystem Technologies provides an overview of the technological status; the development of micropatternings and micro-biosensors; and the applications of micropower with electrochemical microsystems.

This book covers a wide spectrum of issues ranging from fundamental electrochemical processes to their applications in micro- and nanofabrication, microanalyses, microsensing, and their interaction with inorganic surfaces and biological systems. The editors provide comprehensive background to unique processes, such as the technological development of miniaturization, microfabrication, thin film deposition, etching, cleaning, planarization, and silicon processing technologies to introduce a wide range of applications in context.

More than 40 internationally recognized industry, research, and medical experts provide insight on the current status and future trends in their fields. They also highlight the impact of applying electrochemical microsystem technologies on industries such as storage and packaging; microelectronics, sensors, and portable electronics; machining, polishing, anodization, and plating technologies in heavy industries; biosensing, biological implant technology, and neurobiology; and cross-disciplinary integrated systems.

Electrochemical Microsystem Technologies is a valuable reference for graduate/postgraduate students, technologists, and researchers working in the field of electrochemical technology.

Table of Contents


Electrochemical Microsystem Technologies: Principles

Application for Homogenous Electrochemistry: Measurements of Fast Reaction Kinetics

Fundamentals of Scanning Electrochemical Microscopy

Electrochemical Microcells and Surface Analysis

Application of Optical Micro-Methods and Lasers in Electrochemistry

Nucleation and Growth in Microsystem Technology


High Resolution Lithography

Advanced Plating Technology for Electronics Packaging

Micro-Electroforming of Miniaturized Devices for Chemical Applications


Capacitors and Micropower Systems

Batteries for Micropower Applications

Micro Flow Systems for Chemical and Biochemical Applications

Corrosion of Microsystems


Electrochemical Microanalysis

Novel Approaches to Design Silicon-Based Field-Effect Sensors

Miniaturization of Biosensors

Scanning Probe Microscopy as an Analysis Tool

Microelectrode Techniques for Characterization of Advanced Materials for Battery and Sensor Applications


Microsystems For Biosensing Nucleic Acids and Immuno Proteins

New Microelectrode Arrays for Biosensing Membrane Electroporation

Multi-Barrelled Ion-Selective Microelectrodes: Measurements of Cell Volume, Membrane Potential, and Intracellular Ion Concentrations in Invertebrate Nerve Cells

Nerve Cells And Lipid Vesicles On Silicon Chips - Considerations On Ionoelectronic Sensors

About the Series

New Trends in Electrochemical Technology

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Subject Categories

BISAC Subject Codes/Headings:
SCIENCE / Chemistry / Industrial & Technical