Due to their speed, data density, and versatility, optical metrology tools play important roles in today's high-speed industrial manufacturing applications. Handbook of Optical Dimensional Metrology provides useful background information and practical examples to help readers understand and effectively use state-of-the-art optical metrology methods
Optical Metrology: Introduction. Optical Metrology of Larger Objects. Optical Metrology of Medium-Size Objects. Optical Micro-Metrology of Small Objects. Advanced Optical Micro-Metrology Methods. Index.