Handbook of Silicon Semiconductor Metrology: 1st Edition (Hardback) book cover

Handbook of Silicon Semiconductor Metrology

1st Edition

Edited by Alain C. Diebold

CRC Press

896 pages

Purchasing Options:$ = USD
Hardback: 9780824705060
pub: 2001-06-29
$335.00
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eBook (VitalSource) : 9780429207655
pub: 2001-06-29
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Description

Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs,

this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.

Reviews

"…recommended for special libraries and academic libraries serving graduate level programs in these areas."

- E-Streams

"…a cornerstone reference source….uniquely ample and thorough."

-Semiconductor International

"…a formative instrument. …contains valuable and very new information … an instructive and valuable book."

-IASI Polytechnic Magazine

Subject Categories

BISAC Subject Codes/Headings:
TEC008000
TECHNOLOGY & ENGINEERING / Electronics / General
TEC021000
TECHNOLOGY & ENGINEERING / Material Science