Industrial Plasma Engineering: Volume 2: Applications to Nonthermal Plasma Processing, 1st Edition (Hardback) book cover

Industrial Plasma Engineering

Volume 2: Applications to Nonthermal Plasma Processing, 1st Edition

By J Reece Roth

CRC Press

658 pages

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Hardback: 9780750305440
pub: 2001-08-25
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Written by a leading expert in the field, Industrial Plasma Engineering, Volume 2: Applications to Nonthermal Plasma Processing provides a background in the principles and applications of low temperature, partially ionized Lorentzian plasmas that are used industrially. The book also presents a description of plasma-related processes and devices that are of commercial interest. The text is suitable for students or in-service users with a physics and calculus background at the sophomore level. These two volumes are intended to be used as textbooks at the senior or first-year graduate level by students from all engineering and physical science disciplines and as a reference source by in-service engineers.

Table of Contents

Surface Interactions in Plasma Processing

Atmospheric Pressure Plasma Sources

Vacuum Plasma Sources

Plasma Reactors for Plasma Processing

Specialized Techniques and Devices for Plasma Processing

Parametric Plasma Effects on Plasma Processing

Diagnostics for Plasma Processing

Plasma Treatment of Surfaces

Surface Modification by Implantation and Diffusion

Thin Film Deposition by Evaporative Condensation and Sputtering

Plasma Chemical Vapor Deposition (PCVD)

Plasma Etching

About the Author

J Reece Roth Department of Electrical and Computer Engineering University of Tennessee, Knoxville

Subject Categories

BISAC Subject Codes/Headings:
SCIENCE / Physics