MEMS: Applications, 1st Edition (e-Book) book cover

MEMS

Applications, 1st Edition

Edited by Mohamed Gad-el-Hak

CRC Press

568 pages

Purchasing Options:$ = USD
Paperback: 9780367391645
pub: 2019-12-20
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Hardback: 9780849391392
pub: 2005-11-29
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eBook (VitalSource) : 9780429125478
pub: 2005-11-29
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Description

As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection

Table of Contents

Introduction. Inertial Sensors. Micromachined Pressure Sensors: Devices, Interface Circuits, and Performance Limit. Surface Micromachined Devices. Microactuators. Sensors and Actuators for Turbulent Flows. Mibrorobotics. Microscale Vacuum Pumps. Nonlinear Electrokinetic Devices. Micro-Droplet Generators. Micro-Heat-Pipes and Micro-Heat- Spreaders. Microchannel Heat Sinks. Flow Control. The Future: Reactive Control for Skin-Friction Reduction. Towards MEMS Autonomous Control of Free-Shear Flows. Fabrication Technologies for Nanoeletromechanical Systems. Molecular Self-Assembly: Fundamental Concepts and Applications.

Subject Categories

BISAC Subject Codes/Headings:
TEC008070
TECHNOLOGY & ENGINEERING / Electronics / Microelectronics
TEC009020
TECHNOLOGY & ENGINEERING / Civil / General