As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection
Introduction. Inertial Sensors. Micromachined Pressure Sensors: Devices, Interface Circuits, and Performance Limit. Surface Micromachined Devices. Microactuators. Sensors and Actuators for Turbulent Flows. Mibrorobotics. Microscale Vacuum Pumps. Nonlinear Electrokinetic Devices. Micro-Droplet Generators. Micro-Heat-Pipes and Micro-Heat- Spreaders. Microchannel Heat Sinks. Flow Control. The Future: Reactive Control for Skin-Friction Reduction. Towards MEMS Autonomous Control of Free-Shear Flows. Fabrication Technologies for Nanoeletromechanical Systems. Molecular Self-Assembly: Fundamental Concepts and Applications.