The integration of microelectromechanical systems (MEMS) and nanotechnology (NT) in sensors and devices significantly reduces their weight, size, power consumption, and production costs. These sensors and devices can then play greater roles in defense operations, wireless communication, the diagnosis and treatment of disease, and many more applicat
Foreword. Preface. Highlights and Chronological Developmental History of MEMS Devices Involving Nanotechnology. Potential Actuation Mechanisms, Their Performance Capabilities, and Applications. Latest and Unique Methods for Actuation. Packaging, Processing, and Material Requirements for MEMS Devices. RF-MEMS Switches Operating at Microwave and mm-Wave Frequencies. RF/Microwave MEMS Phase Shifter. Applications of Micropumps and Microfluidic. Miscellaneous MEMS/Nanotechnology Devices and Sensors for Commercial and Military Applications. Materials for MEMS- and Nanotechnology-Based Sensors and Devices. Index.