MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications: 1st Edition (Hardback) book cover

MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications

1st Edition

By A. R. Jha

CRC Press

432 pages | 111 B/W Illus.

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pub: 2008-04-08
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The integration of microelectromechanical systems (MEMS) and nanotechnology (NT) in sensors and devices significantly reduces their weight, size, power consumption, and production costs. These sensors and devices can then play greater roles in defense operations, wireless communication, the diagnosis and treatment of disease, and many more applications.

MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications presents the latest performance parameters and experimental data of state-of-the-art sensors and devices. It describes packaging details, materials and their properties, and fabrication requirements vital for design, development, and testing. Some of the cutting-edge materials covered include quantum dots, nanoparticles, photonic crystals, and carbon nanotubes (CNTs).

This comprehensive work encompasses various types of MEMS- and NT-based sensors and devices, such as micropumps, accelerometers, photonic bandgap devices, acoustic sensors, CNT-based transistors, photovoltaic cells, and smart sensors. It also discusses how these sensors and devices are used in a number of applications, including weapons’ health, battlefield monitoring, cancer research, stealth technology, chemical detection, and drug delivery.


“… This comprehensive book on MEMS and nanotechnology (NT) provides a wide-lens perspective of the field. … This stimulating book should appeal to a wide audience consisting of design engineers, research scientists, and program managers. It contains a wealth of synergistic information and insights relating to the innovative field of MEMS and NTs. My friend, A.R. Jha, one of the most prolific writers, has covered a wide range of emerging technical fields, not yet included in the established literature. I am proud to write this foreword in support of his most recent book.”

—From the Foreword, Dr. Ashok K. Sinha, Retired Senior Vice President, Applied Materials, Inc., Santa Clara, California, USA

Table of Contents



Highlights and Chronological Developmental History of MEMS Devices Involving Nanotechnology


What Is MEMS?

Potential Applications of MEMS Devices in Commercial and Space Systems

MEMS Technology for Military Systems Applications

MEMS for Commercial, Industrial, Scientific, and Biomedical System Applications

MEMS Technology for Hard-Disk Drives

MEMS Devices for Uncooled Thermal Imaging Arrays and Cooled Focal Planar Arrays for Various Applications

Applications of Nanotechnology in IR and Electro-Optical Sensors for Biometric and Security Applications

MEMS Technology for Medical Applications

MEMS Technology for Satellite Communications and Space Systems Applications

MEMS Devices for Auto Industry Applications

MEMS Technology for Aerospace System Applications

Potential Actuation Mechanisms, Their Performance Capabilities, and Applications


Classification of Actuation Mechanisms

Structural Requirements and Performance Capabilities of Electrostatic Actuation Mechanism

Piezoelectric Actuation Mechanism

Electrothermal Actuation Mechanism

Electromagnetic Actuation Mechanism

Electrodynamic Actuation Mechanism

Electrochemical Actuation Mechanism

Latest and Unique Methods for Actuation


Electrostatic Rotary Microactuator with Improved Shaped Design

Unique Microactuator Design for HHD Applications

Capabilities of Vertical Comb Array Microactuator

Capabilities of Bent-Beam Electrothermal Actuators

Packaging, Processing, and Material Requirements for MEMS Devices


Packaging and Fabrication Materials

Impact of Environments on MEMS Performance

Material Requirements for Electrostatic Actuator Components

Substrate Materials Best Suited for Various MEMS Devices

RF-MEMS Switches Operating at Microwave and mm-Wave Frequencies


Operating Principle and Critical Performance Parameters of MEMS Devices

Performance Capabilities and Design Aspects of RF-MEMS Shunt Switches

MEMS Shunt Switch Configuration for High Isolation

MEMS Switches Using Metallic Membranes

RF-MEMS Switches with Low-Actuation Voltage

RF-MEMS Series Switches

Effects of Packaging Environments on the Functionality and Reliability of the MEMS Switches

Packaging Material Requirements for MEMS Switches

RF/Microwave MEMS Phase Shifter


Properties and Parameters of CPW Transmission Lines

Distributed MEMS Transmission-Line Phase Shifters

Design Aspects and DMTL Parameter Requirements for TTD Phase Shifters Operating at mm-Wave Frequencies

Two-Bit MEMS DMTL Phase Shifter Designs

Multi-Bit Digital Phase Shifter Operating at K and Ka Frequencies

Ultrawide Band Four-Bit True Time-Delay MEMS Phase Shifter Operating over dc-40 GHz

Two-Bit, V-Band Reflection-Type MEMS Phase Shifter

Three-Bit, Ultralow Loss Distributed Phase Shifter Operating over K-Band Frequencies

Three-Bit, V-Band, Reflection-Type Distributed MEMS Phase Shifter

Applications of Micropumps and Microfluidic


Potential Applications of Micropumps

Design Aspects of Fixed-Valve Micropumps

Dynamic Modeling for Piezoelectric Valve-Free Micropumps

Design Aspects and Performance Capabilities of an Electrohydrodynamic Ion-Drag Micropump

Capabilities of a Ferrofluidic Magnetic Micropump

Miscellaneous MEMS/Nanotechnology Devices and Sensors for Commercial and Military Applications


MEMS Varactors or Tunable Capacitors

Micromechanical Resonators

Micromechanical Filters


Oscillator Using Micromechanical Resonator Technology

V-Band MEMS-Based Tunable Band-Pass Filters

MEMS-Based Strain Sensors

MEMS Interferometric Accelerometers

MEMS-Based Micro-Heat Pipes

MEMS-Based Thin-Film Microbatteries

Materials for MEMS- and Nanotechnology-Based Sensors and Devices


Photonic Crystals

Nanotechnology-Based Materials and Applications


Quantum Dots


MEMS Deformable Micro-Mirrors

Carbon Nanotubes and CNT Arrays

Nanotechnology- and MEMS-Based Sensors and Devices for Specific Applications


A Summary and References appear at the end of each chapter.

Subject Categories

BISAC Subject Codes/Headings:
TECHNOLOGY & ENGINEERING / Mobile & Wireless Communications