Mega-Bit Memory Technology - From Mega-Bit to Giga-Bit : From Mega-Bit to Giga-Bit book cover
1st Edition

Mega-Bit Memory Technology - From Mega-Bit to Giga-Bit
From Mega-Bit to Giga-Bit

Edited By

Hiroyuki Tango

Copyright Year 1998



ISBN 9789056990985
Published November 26, 1998 by CRC Press
293 Pages
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Book Description

This book describes LSI process technology, and focuses on the rapid progress of state-of-the-art dynamic random access memory (DRAM) process technologies—the longstanding technology driver of Si ULSI—as they advance from the 1 Kbit to the Gbit DRAM era.

Table of Contents

1. Memory Cell 2. Dry Etching 3. Thin Film Insulator 4. Impurity Doping 5. Metalization 6. Crystal Technology 7.
SOI Device Technology 8. Lithography 9. Chemical Vapor Deposition 10. Process and Device Simulation

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