MEMS devices are finding increasingly widespread use in a variety of settings, from chemical and biological analysis to sensors and actuators in automotive applications. Along with this massive growth, the field is still experiencing growing pains as fabrication processes are refined and new applications are attempted. Anyone serious about entering
MICROMACHINING. Photolithography. Silicon Micromachining. Nonsilicon Processes. Mask Design. MICROSYSTEMS. Microsensors. Microactuators. Micro Total Analysis Systems. Integrated Optics. Assembly and Packaging. Nanotechnology. INTERFACING. Amplifiers and Filtering. Computer Interfacing. Output Drivers. Index.