Microengineering, MEMS, and Interfacing: A Practical Guide, 1st Edition (e-Book) book cover

Microengineering, MEMS, and Interfacing

A Practical Guide, 1st Edition

By Danny Banks

CRC Press

352 pages

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Description

MEMS devices are finding increasingly widespread use in a variety of settings, from chemical and biological analysis to sensors and actuators in automotive applications. Along with this massive growth, the field is still experiencing growing pains as fabrication processes are refined and new applications are attempted. Anyone serious about entering

Table of Contents

MICROMACHINING. Photolithography. Silicon Micromachining. Nonsilicon Processes. Mask Design. MICROSYSTEMS. Microsensors. Microactuators. Micro Total Analysis Systems. Integrated Optics. Assembly and Packaging. Nanotechnology. INTERFACING. Amplifiers and Filtering. Computer Interfacing. Output Drivers. Index.

Subject Categories

BISAC Subject Codes/Headings:
TEC008070
TECHNOLOGY & ENGINEERING / Electronics / Microelectronics
TEC009020
TECHNOLOGY & ENGINEERING / Civil / General
TEC016000
TECHNOLOGY & ENGINEERING / Industrial Design / General