1st Edition

Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology




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ISBN 9780824799519
Published June 25, 1998 by CRC Press
336 Pages

USD $280.00

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Book Description

"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."

Table of Contents

Exposure systems in photolithography; optical pattern transfer; chemistry of photoresist materials; practical processes in microlithography; X-ray lithography; electron-beam lithography; variations in microlithographic process.

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