Nanocomposite materials as a special class of nanostructured materials have recently attracted great interest due to their extraordinary mechanical properties as well as thermal stability and oxidation resistance. The unique structure and exceptional properties make nanocomposite materials a possible alternative to traditional polycrystalline mater
Synthesis of New Nanostructured Materials. Nanocrystalline Materials. Multilayers and Superlattices. Nanocomposite Films. Thin Film Processing. Principles of Plasma Discharges. Physical Sputtering and Transport of Sputtered Material. Sputter Deposition Techniques. Reactive Sputter Deposition. Film Formation and Structure. Condensation of Sputtered Material. Interface Formation. Nucleation and Growth. Microstructure of Thin Films, Structure Zone Models, Advantages and Limitations of Sputter Deposition Processes. Structure-Property Relation in Hard Films. Me-Si-N Films With a Low and Intermediate Si Content. Structure, Morphology and Phase Composition Hardness and Macrostress Oxidation Resistance Problems with Reproducibility. Novel nanocomposite films - Zr-Si-N Films with a High Si Content. Deposition Rate. Elemental Composition. Chemical Bonding and Phase Composition. Electrical and Optical Properties. Structure. Morphology. Surface Roughness. Mechanical Properties. Macrostress. Effect of Substrate Bias. Thermal Stability. Oxidation Resistance. High Si-containing W-Si-N Nanocomposite Films. Deposition Rate. Elemental Composition. Chemical Bonding and Phase Composition. Structure. Morphology. Surface Roughness. Mechanical Properties. Macrostress. Oxidation Resistance. Characterization of Thin Films. Mechanical Properties. X-Ray Diffraction Analysis. Stress Measurement. Film Thickness Measurement. Scanning Electron Microscopy. Energy Dispersive X-Ray Spectrometry. Differential Scanning Calorimetry. Thermogravimetric Analysis.