Silicon Molecular Beam Epitaxy : Volume II book cover
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Silicon Molecular Beam Epitaxy
Volume II




ISBN 9781315897523
Published December 14, 2017 by CRC Press
306 Pages

 
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Book Description

This book focuses on homoepitaxy with the necessary systems, techniques, and models for growth and dopant incorporation. It discusses the obstacles any new technology must overcome to be commercially successful with specific references to the challenges confronting Silicon-Molecular Beam Epitaxy.

Table of Contents

9. Principles of Heteroepitaxy 10. Epitaxial Silicides 11. Silicon-Based Semiconductor Heterostructures 12. Assessment of Layers 13. Industrial Application: Perspective and Requirements 14. Industrial Application: Possible Approaches 15. Molecular Beam Epitaxy of Silicon Materials: A Bibliography 1962 - 1985

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