The MEMS Handbook - 3 Volume Set  book cover
2nd Edition

The MEMS Handbook - 3 Volume Set

Edited By

Mohamed Gad-el-Hak

ISBN 9780849321061
Published December 22, 2005 by CRC Press
1720 Pages 970 B/W Illustrations

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Book Description

As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This bestselling handbook is now more convenient than ever, and its coverage is unparalleled.

MEMS: Introduction and Fundamentals

The first volume covers the theoretical and conceptual underpinnings of the field, emphasizing the physical phenomena that dominate at the micro-scale. It also explores the mechanical properties of MEMS materials, modeling and simulation of MEMS, control theory, and bubble/drop transport in microchannels. Chapters were updated where necessary, and the book also includes two new chapters on microscale hydrodynamics and lattice Boltzmann simulations. This volume builds a strong foundation for further study and work in the MEMS field.

MEMS: Design and Fabrication

This second volume details the techniques, technologies, and materials involved in designing and fabricating MEMS devices. It begins with an overview of MEMS materials and then examines in detail various fabrication and manufacturing methods, including LIGA and macromolding, X-ray based fabrication, EFAB® technology, and deep reactive ion etching. This book includes three new chapters on polymeric-based sensors and actuators, diagnostic tools, and molecular self-assembly. It is a thorough guide to the important aspects of design and fabrication.

MEMS: Applications

This third volume offers a broad overview of current, emerging, and possible future MEMS applications. It surveys inertial sensors, micromachined pressure sensors, surface micromachined devices, microscale vacuum pumps, reactive control for skin-friction reduction, and microchannel heat sinks, among many others. Two new chapters discuss microactuators and nonlinear electrokinetic devices. This book is vital to understanding the current and possible capabilities of MEMS technologies.

In addition to seven new chapters, existing chapters were updated and expanded where necessary to reflect the current state of the field. In all, The MEMS Handbook, Second Edition comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling field of MEMS.

Table of Contents

Volume 1
MEMS: Introduction and Fundamentals
Introduction; Mohamed Gad-el-Hak
Scaling of Micromechanical Devices; William Trimmer and Robert H. Stroud
Mechanical Properties of MEMS Materials; William N. Sharpe, Jr.
Flow Physics; Mohamed Gad-el-Hak
Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains; Robert M. Kirby, George Em Karniadakis, Oleg Mikulchenko, and Kartikeya Mayaram
Molecular-Based Microfluidic Simulation Models; Ali Beskok
Hydrodynamics of Small-Scale Internal Gaseous Flows; Nicolas G. Hadjiconstantinou
Burnett Simulations of Flows in Microdevices; Ramesh K. Agarwal and Keon-Young Yun
Lattice Boltzmann Simulations of Slip Flows in Microchannels; Ramesh K. Agarwal
Liquid Flow in Microchannels; Kendra V. Sharp, Ronald J. Adrian, Juan G. Santiago, and Joshua I. Molho
Lubrication in MEMS; Kenneth Breuer
Physics of Thin Liquid Films; Alexander Oron
Bubble/Drop Transport in Microchannels; Hsueh-Chia Chang
Fundamentals of Control Theory; J. William Goodwine
Model-Based Flow Control for Distributed Architectures; Thomas R. Bewley
Soft Computing in Control; Mihir Sen and Bill Goodwine
Volume 2
MEMS: Design and Fabrication
Introduction; Mohamed Gad-el-Hak
Materials for Microelectromechanical Systems; Christian A. Zorman, Mehran Mehregany, and J. Jay McMahon
MEMS Fabrication; Guangyao Jia and Marc J. Madou
LIGA and Micromolding; Guangyao Jia and Marc J. Madou
X-Ray Based Fabrication; Todd Christenson
EFAB® Technology and Applications; Adam L. Cohen and Chris A. Bang
Single-Crystal Silicon Carbide MEMS: Fabrication, Characterization, and Reliability; Robert S. Okojie
Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide; Glenn M. Beheim and Laura J. Evans
Polymer Microsystems: Materials and Fabrication; Gary M. Atkinson and Zoubeida Ounaies
Optical Diagnostics to Investigate the Entrance Length in Microchannels; Sang-Youp Lee, Jaesung Jang, and Steven T. Wereley
Microfabricated Chemical Sensors for Aerospace Applications; Gary W. Hunter, Jennifer C. Xu, Chung-Chiun Liu, and Darby B. Makel
Packaging of Harsh Environment MEMS Devices; Liang-Yu Chen and Jih-Fen Lei
Fabrication Technologies for Nanoelectromechanical Systems; Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider
Molecular Self-Assembly: Fundamental Concepts and Applications; Jill A. Miwa and Federico Rosei
Volume 3
MEMS: Applications
Introduction; Mohamed Gad-el-Hak
Inertial Sensors; Paul L. Bergstrom, Melissa L. Trombley, and Gary G. Li
Micromachined Pressure Sensors: Devices, Interface Circuits, and Performance Limits; Yogesh B. Gianchandani, Chester G. Wilson, and Jae-Sing Park
Surface Micromachined Devices; Andrew D. Oliver and David W. Plummer
Microactuators; Alberto Borboni
Sensors and Actuators for Turbulent Flows; Lennart Löfdahl and Mohamed Gad-el-Hak
Microrobotics; Thorbjörn Ebefors and Göran Stemme
Microscale Vacuum Pumps; E. Phillip Muntz, Marcus Young, and Stephen E. Vargo
Nonlinear Electrokinetic Devices; Yuxing Ben and Hsueh-Chia Chang
Microdroplet Generators; Fan-Gang Tseng
Micro Heat Pipes and Micro Heat Spreaders; G.P. “Bud” Peterson and Choondal B. Sobhan
Microchannel Heat Sinks; Yitshak Zohar
Flow Control; Mohamed Gad-el-Hak
Reactive Control for Skin-Friction Reduction; Haecheon Choi
Toward MEMS Autonomous Control of Free-Shear Flows; Ahmed Naguib Index

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