The MEMS Handbook - 3 Volume Set: 2nd Edition (Hardback) book cover

The MEMS Handbook - 3 Volume Set

2nd Edition

Edited by Mohamed Gad-el-Hak

CRC Press

1,720 pages | 970 B/W Illus.

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Hardback: 9780849321061
pub: 2005-12-22
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Description

As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This bestselling handbook is now more convenient than ever, and its coverage is unparalleled.

MEMS: Introduction and Fundamentals

The first volume covers the theoretical and conceptual underpinnings of the field, emphasizing the physical phenomena that dominate at the micro-scale. It also explores the mechanical properties of MEMS materials, modeling and simulation of MEMS, control theory, and bubble/drop transport in microchannels. Chapters were updated where necessary, and the book also includes two new chapters on microscale hydrodynamics and lattice Boltzmann simulations. This volume builds a strong foundation for further study and work in the MEMS field.

MEMS: Design and Fabrication

This second volume details the techniques, technologies, and materials involved in designing and fabricating MEMS devices. It begins with an overview of MEMS materials and then examines in detail various fabrication and manufacturing methods, including LIGA and macromolding, X-ray based fabrication, EFAB® technology, and deep reactive ion etching. This book includes three new chapters on polymeric-based sensors and actuators, diagnostic tools, and molecular self-assembly. It is a thorough guide to the important aspects of design and fabrication.

MEMS: Applications

This third volume offers a broad overview of current, emerging, and possible future MEMS applications. It surveys inertial sensors, micromachined pressure sensors, surface micromachined devices, microscale vacuum pumps, reactive control for skin-friction reduction, and microchannel heat sinks, among many others. Two new chapters discuss microactuators and nonlinear electrokinetic devices. This book is vital to understanding the current and possible capabilities of MEMS technologies.

In addition to seven new chapters, existing chapters were updated and expanded where necessary to reflect the current state of the field. In all, The MEMS Handbook, Second Edition comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling field of MEMS.

Table of Contents

Volume 1

MEMS: Introduction and Fundamentals

Introduction; Mohamed Gad-el-Hak

Scaling of Micromechanical Devices; William Trimmer and Robert H. Stroud

Mechanical Properties of MEMS Materials; William N. Sharpe, Jr.

Flow Physics; Mohamed Gad-el-Hak

Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains; Robert M. Kirby, George Em Karniadakis, Oleg Mikulchenko, and Kartikeya Mayaram

Molecular-Based Microfluidic Simulation Models; Ali Beskok

Hydrodynamics of Small-Scale Internal Gaseous Flows; Nicolas G. Hadjiconstantinou

Burnett Simulations of Flows in Microdevices; Ramesh K. Agarwal and Keon-Young Yun

Lattice Boltzmann Simulations of Slip Flows in Microchannels; Ramesh K. Agarwal

Liquid Flow in Microchannels; Kendra V. Sharp, Ronald J. Adrian, Juan G. Santiago, and Joshua I. Molho

Lubrication in MEMS; Kenneth Breuer

Physics of Thin Liquid Films; Alexander Oron

Bubble/Drop Transport in Microchannels; Hsueh-Chia Chang

Fundamentals of Control Theory; J. William Goodwine

Model-Based Flow Control for Distributed Architectures; Thomas R. Bewley

Soft Computing in Control; Mihir Sen and Bill Goodwine

Index

Volume 2

MEMS: Design and Fabrication

Introduction; Mohamed Gad-el-Hak

Materials for Microelectromechanical Systems; Christian A. Zorman, Mehran Mehregany, and J. Jay McMahon

MEMS Fabrication; Guangyao Jia and Marc J. Madou

LIGA and Micromolding; Guangyao Jia and Marc J. Madou

X-Ray Based Fabrication; Todd Christenson

EFAB® Technology and Applications; Adam L. Cohen and Chris A. Bang

Single-Crystal Silicon Carbide MEMS: Fabrication, Characterization, and Reliability; Robert S. Okojie

Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide; Glenn M. Beheim and Laura J. Evans

Polymer Microsystems: Materials and Fabrication; Gary M. Atkinson and Zoubeida Ounaies

Optical Diagnostics to Investigate the Entrance Length in Microchannels; Sang-Youp Lee, Jaesung Jang, and Steven T. Wereley

Microfabricated Chemical Sensors for Aerospace Applications; Gary W. Hunter, Jennifer C. Xu, Chung-Chiun Liu, and Darby B. Makel

Packaging of Harsh Environment MEMS Devices; Liang-Yu Chen and Jih-Fen Lei

Fabrication Technologies for Nanoelectromechanical Systems; Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider

Molecular Self-Assembly: Fundamental Concepts and Applications; Jill A. Miwa and Federico Rosei

Index

Volume 3

MEMS: Applications

Introduction; Mohamed Gad-el-Hak

Inertial Sensors; Paul L. Bergstrom, Melissa L. Trombley, and Gary G. Li

Micromachined Pressure Sensors: Devices, Interface Circuits, and Performance Limits; Yogesh B. Gianchandani, Chester G. Wilson, and Jae-Sing Park

Surface Micromachined Devices; Andrew D. Oliver and David W. Plummer

Microactuators; Alberto Borboni

Sensors and Actuators for Turbulent Flows; Lennart Löfdahl and Mohamed Gad-el-Hak

Microrobotics; Thorbjörn Ebefors and Göran Stemme

Microscale Vacuum Pumps; E. Phillip Muntz, Marcus Young, and Stephen E. Vargo

Nonlinear Electrokinetic Devices; Yuxing Ben and Hsueh-Chia Chang

Microdroplet Generators; Fan-Gang Tseng

Micro Heat Pipes and Micro Heat Spreaders; G.P. “Bud” Peterson and Choondal B. Sobhan

Microchannel Heat Sinks; Yitshak Zohar

Flow Control; Mohamed Gad-el-Hak

Reactive Control for Skin-Friction Reduction; Haecheon Choi

Toward MEMS Autonomous Control of Free-Shear Flows; Ahmed Naguib Index

About the Series

Mechanical and Aerospace Engineering Series

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Subject Categories

BISAC Subject Codes/Headings:
TEC008070
TECHNOLOGY & ENGINEERING / Electronics / Microelectronics
TEC009020
TECHNOLOGY & ENGINEERING / Civil / General