1st Edition

Adhesion Aspects in MEMS/NEMS





ISBN 9789004190948
Published February 18, 2011 by CRC Press
410 Pages

USD $310.00

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Book Description

Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects owing to their small size and limited actuation force that can be generated. Extension of MEMS technology concepts to the nanoscale and development of NanoElectroMechanicalSystems(NEMS) will result in systems even more strongly influenced by surface forces.

The book is divided into five parts as follows: Part 1: Understanding Through Continuum Theory; Part 2: Computer Simulation of Interfaces; Part 3: Adhesion and Friction Measurements; Part 4: Adhesion in Practical Applications; and

Part 5: Adhesion Mitigation Strategies.

This compilation constitutes the first book on this extremely important topic in the burgeoning field of MEMS/NEMS. It is obvious from the topics covered in this book that bountiful information is contained here covering understanding of surface forces and adhesion as well as novel ways to mitigate adhesion in MEMS/NEMS.

This book should be of great interest to anyone engaged in the wonderful and fascinating field of MEMS/NEMS, as it captures the current R&D activity.

Table of Contents

Part 1: Understanding through Continuum Theory 1. Numerical Analysis of Contact Mechanics between a Spherical Slider and a Flat Disk with Low Roughness considering Lennard–Jones Surface Forces 2. Equilibrium Vapor Adsorption and Capillary Force: Exact Laplace–Young Equation Solution and Circular Approximation Approaches 3. Which Fractal Parameter Contributes Most to Adhesion? 4. Effects of Contacting Surfaces on MEMS Device Reliability 5. A van der Waals Force-Based Adhesion Model for Micromanipulation Part 2: Computer Simulation of Interfaces 6. Lattice Gas Monte Carlo Simulation of Capillary Forces in Atomic Force Microscopy 7. Large Scale Molecular Dynamics Simulations of Vapor Phase Lubrication for MEMS 8. Atomistic Factors Governing Adhesion between Diamond, Amorphous Carbon and Model Diamond Nanocomposite Surfaces Part 3: Adhesion and Friction Measurements 9. Theoretical and Experimental Study of the Influence of AFM Tip Geometry and Orientation on Capillary Force 10. Odd–Even Effects in the Friction of Self-Assembled Monolayers of Phenyl-Terminated Alkanethiols in Contacts of Different Adhesion Strengths 11. The Pull-Off Force and the Work of Adhesion: New Challenges at the Nanoscale 12. Interfacial Adhesion between Rough Surfaces of Polycrystalline Silicon and Its Implications for M/NEMS Technology 13. Effect of Air–Plasma Pre-treatment of Si Substrate on Adhesion Strength and Tribological Properties of a UHMWPE Film Part 4: Adhesion in Practical Applications 14. A Review of Adhesion in an Ohmic Microswitch 15. Characterization of Gold–Gold Microcontact Behavior Using a Nanoindenter Based Setup 16. Characterization and Adhesion of Interacting Surfaces in Capacitive RF MEMS Switches Undergoing Cycling 17. Molecular Mobility and Interfacial Dynamics in Organic Nano-electromechanical Systems (NEMS) Part 5: Adhesion Mitigation Strategies 18. Microscale Friction Reduction by Normal Force Modulation in MEMS 19. Microchannel Induced Surface Bulging of a Soft Elasto

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Editor(s)

Biography

Kim, Seong H.; Dugger, Michael T.; Mittal, Kash L.