Introduction
Evolution of MEMS
Applications of MEMS
BioMEMS Applications
MEMS Resources
Text Goals and Organization
Miniaturization and Scaling
BioMEMS Materials
Traditional MEMS and Microelectronic Materials
Polymeric Materials for MEMS
Biomaterials
Microfabrication Methods and Processes for BioMEMS
Introduction
Microlithography
Doping
Micromachining
Wafer Bonding, Assembly, and Packaging
Surface Treatment
Conversion Factors for Energy and Intensity Units
Laboratory Exercises
Microfluidics
Introduction and Fluid Properties
Concepts in Microfluidics
Fluid-Transport Phenomena and Pumping
Flow Control
Laboratory Exercises
Lab-on-a-Chip or Micro Total Analysis Systems
Microanalytical Systems in Chemistry and Biology
Sample Pretreatment
Sample Introduction
Separations
Sensing and Detection Methods
Sensing and Detection
Sensor Characteristics
Principles of Physical Sensing
Biological and Chemical Detection Methods
Applications to Cells, Nucleic Acids, and Proteins
Cells
Nucleic Acids
Proteins
Clinical Monitoring
Flow Cytometry
Microdialysis
Catheter-Based Sensors
Endoscopy
Point of Care
MEMS Implants and Bioelectric Interfaces
Implantable MEMS
Microelectrodes and Neural Probes
Implantable Sensors
Drug Delivery
Tissue Engineering
Index
Problems and References appear at the end of each chapter.
Biography
Ellis Meng is an associate professor in the Department of Biomedical Engineering and the Ming Hsieh Department of Electrical Engineering at the University of Southern California. As an assistant professor, she held the Viterbi Early Career Chair. One of Technology Review’s 2009 Young Innovators Under 35, Dr. Meng has been a recipient of the NSF CAREER Award and the Wallace H. Coulter Foundation Early Career Translational Research Award.
