Biomedical Microsystems: 1st Edition (Hardback) book cover

Biomedical Microsystems

1st Edition

By Ellis Meng

CRC Press

408 pages | 306 B/W Illus.

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Hardback: 9781420051223
pub: 2010-09-29
eBook (VitalSource) : 9781420051230
pub: 2011-06-22
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Poised to dramatically impact human health, biomedical microsystems (bioMEMS) technologies incorporate various aspects from materials science, biology, chemistry, physics, medicine, and engineering. Reflecting the highly interdisciplinary nature of this area, Biomedical Microsystems covers the fundamentals of miniaturization, biomaterials, microfabrication, and nanotechnology, along with relevant applications.

Written by an active researcher who was recently named one of Technology Review’s Young Innovators Under 35, the book begins with an introduction to the benefits of miniaturization. It then introduces materials, fabrication technology, and the necessary components of all bioMEMS. The author also covers fundamental principles and building blocks, including microfluidic concepts, lab-on-a-chip systems, and sensing and detection methods. The final chapters explore several important applications of bioMEMS, such as microdialysis, catheter-based sensors, MEMS implants, neural probes, and tissue engineering.

For readers with a limited background in MEMS and bioMEMS, this book provides a practical introduction to the technology used to make these devices, the principles that govern their operation, and examples of their application. It offers a starting point for understanding advanced topics and encourages readers to begin to formulate their own ideas about the design of novel bioMEMS. A solutions manual is available for instructors who want to convert this reference to classroom use.

Table of Contents


Evolution of MEMS

Applications of MEMS

BioMEMS Applications

MEMS Resources

Text Goals and Organization

Miniaturization and Scaling

BioMEMS Materials

Traditional MEMS and Microelectronic Materials

Polymeric Materials for MEMS


Microfabrication Methods and Processes for BioMEMS





Wafer Bonding, Assembly, and Packaging

Surface Treatment

Conversion Factors for Energy and Intensity Units

Laboratory Exercises


Introduction and Fluid Properties

Concepts in Microfluidics

Fluid-Transport Phenomena and Pumping

Flow Control

Laboratory Exercises

Lab-on-a-Chip or Micro Total Analysis Systems

Microanalytical Systems in Chemistry and Biology

Sample Pretreatment

Sample Introduction


Sensing and Detection Methods

Sensing and Detection

Sensor Characteristics

Principles of Physical Sensing

Biological and Chemical Detection Methods

Applications to Cells, Nucleic Acids, and Proteins


Nucleic Acids


Clinical Monitoring

Flow Cytometry


Catheter-Based Sensors


Point of Care

MEMS Implants and Bioelectric Interfaces

Implantable MEMS

Microelectrodes and Neural Probes

Implantable Sensors

Drug Delivery

Tissue Engineering


Problems and References appear at the end of each chapter.

About the Author

Ellis Meng is an associate professor in the Department of Biomedical Engineering and the Ming Hsieh Department of Electrical Engineering at the University of Southern California. As an assistant professor, she held the Viterbi Early Career Chair. One of Technology Review’s 2009 Young Innovators Under 35, Dr. Meng has been a recipient of the NSF CAREER Award and the Wallace H. Coulter Foundation Early Career Translational Research Award.

Subject Categories

BISAC Subject Codes/Headings:
MEDICAL / Biotechnology
SCIENCE / Mechanics / Dynamics / Thermodynamics