1st Edition
Contamination-Free Manufacturing for Semiconductors and Other Precision Products
By Robert P. Donovan
Copyright 2001
460 Pages
by
CRC Press
460 Pages
by
CRC Press
Also available as eBook on:
Recognizing the need for improved control measures in the manufacturing process of highly sensitized semiconductor technology, this practical reference provides in-depth and advanced treatment on the origins, procedures, and disposal of a variety of contaminants. It uses contemporary examples based on the latest hardware and processing apparatus to illustrate previously unavailable results and... Read more
National Technology Roadmap for Semiconductors - basis and alignment; off-wafer measurement of contaminants; on-wafer measurement of molecular contaminants; transport and deposition of aerosol particles; particulate deposition in liquid systems; deposition of molecular contaminants in gaseous environments; contamination removal from surfaces; deposition of metallic contaminants from liquids and their removal; sources of contamination and their control.
Biography
Robert P. Donovan
