Crystal Growth and Evaluation of Silicon for VLSI and ULSI: 1st Edition (e-Book) book cover

Crystal Growth and Evaluation of Silicon for VLSI and ULSI

1st Edition

By Golla Eranna

CRC Press

430 pages

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Paperback: 9781138034198
pub: 2016-10-19
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Hardback: 9781482232813
pub: 2014-12-08
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pub: 2014-12-08
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Description

Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because of its reactivity. As a solid, silicon is chemical

Table of Contents

Introduction. Silicon: The Key Material for Integrated Circuit Fabrication Technology. Importance of Single Crystals for Integrated Circuit Fabrication. Different Techniques for Growing Single-Crystal Silicon. From Silicon Ingots to Silicon Wafers. Evaluation of Silicon Wafers. Resistivity and Impurity Concentration Mapping of Silicon Wafers. Impurities in Silicon Wafers. Defects in Silicon Wafers. Silicon Wafer Preparation for VLSI and ULSI Processing. Packing of Silicon Wafers.

About the Author

Golla Eranna obtained his master's degree from Sri Venkateswara University, Tirupati, India, with a top rank in the field of semiconductor physics. After that, he joined and received his Ph.D from the Indian Institute of Technology (IIT) Madras. Later, he moved to the IIT Kharagpur Microelectronics Centre. Dr. Eranna joined CEERI, Pilani, India, as a scientist and is currently a senior principal scientist. He became a professor under the Academy of Scientific and Innovative Research (CSIR, New Delhi), and regularly lectures on VLSI processing technology. He also maintains a full-fledged semiconductor device fabrication laboratory.

Subject Categories

BISAC Subject Codes/Headings:
SCI055000
SCIENCE / Physics
TEC008070
TECHNOLOGY & ENGINEERING / Electronics / Microelectronics
TEC021000
TECHNOLOGY & ENGINEERING / Material Science