1st Edition

Dynamic RAM Technology Advancements

By Muzaffer A. Siddiqi Copyright 2013
382 Pages 197 B/W Illustrations
by CRC Press

382 Pages 197 B/W Illustrations
by CRC Press

382 Pages 197 B/W Illustrations
by CRC Press

Because of their widespread use in mainframes, PCs, and mobile audio and video devices, DRAMs are being manufactured in ever increasing volume, both in stand-alone and in embedded form as part of a system on chip. Due to the optimum design of their components—access transistor, storage capacitor, and peripherals—DRAMs are the cheapest and densest semiconductor memory currently available. As a... Read more

Random Access Memories
Static Random Access Memory
Dynamic Random Access Memories: Basics
One-Transistor DRAM Cell
Initial-Stage DRAM Technology Developments
DRAM Operating Modes
Silicon-on-Insulator Technology Based DRAMs
Advanced Nonvolatile Memories

DRAM Cell Development

Planar DRAM Cell
Three-Dimensional Capacitor DRAM Cell
Access Transistor Stacked above the Trench Capacitor Cell
Trench Transistor Cell
Buried Storage Electrode Cell
Buried Capacitor or Stacked Transistor Cell
Stacked Capacitor Cells

DRAM Technologies
DRAM Technology—Early Stage Development
Two-Dimensional DRAM Cell
16 Mbit–256 Mbit, 1 Gbit DRAM Development
Capacitor over Bit Line (COB) DRAM Cell

Advanced DRAM Cell Transistors
Recess-Channel- Array Transistor
Vertical Depleted Lean-Channel Transistor Structure
FinFET—A Self-Aligned DG-MOSFET
Body Tied MOSFETs/Bulk FinFETs
Multichannel FET
Saddle MOSFET
Saddle-Fin FET
Surrounding Gate Transistor
Three-Dimensional Memory Architecture: Cell Area Less Than 4 F2
BEST and VERIBEST DRAM Cells
Vertical Transistors
Advanced Recessed FinFETs

Storage Capacitor Enhancement Techniques
Hemispherical Grain Storage Node
Higher Permittivity and Layered Dielectrics
Low-Temperature HSG
Sub–100 nm Trench Capacitor Drams
Metal Insulator Metal Capacitor Structure

Advanced DRAM Technologies
Advanced Cell Structures
Robust Memory Cell—Mechanical Stability of Storage Node
DRAM Cell Transistor Technology
Cell Capacitor Technology
Lithography Technology
Isolation Techniques
Bit Line, Word Line, and Gate Technology
Cell Connections
Interconnection/Metallization Technology
Advanced DRAM Technology Developments
Embedded DRAMs

Leakages in DRAMs
Leakage Currents in DRAMs
Power Dissipation in DRAMs
Cell Signal Charge
Power Dissipation for Data Retention
Low-Power Schemes in DRAM
On-Chip Voltage Converter Circuits
Refresh Time Extension
Subthreshold Current Reduction
Multithreshold-Voltage CMOS Schemes
VGS Reverse Biasing
Leakage Current Reduction Techniques in DRAMs
Analysis of Subthreshold Leakage Reduction
Subthreshold Leakage Reduction for Low-Voltage Applications
Data Retention Time and its Improvement

Memory Peripheral Circuits
Address Decoder Basics
Address Decoding Developments
DRAM Sense Amplifiers
Error Checking and Correction
On Chip Redundancy Techniques and ECC
Redundancy Schemes for High-Density DRAMs

Biography

Siddiqi, Muzaffer A.

"The book represents an ultimate guide to DRAM technology for students as well as lecturers or experts in the field … . It offers detailed descriptions of technology advancements together with motivations, focusing on cell topology, critical technological issues such as advanced lithography and patterning, new materials introduction and the evolved physics affecting cell parameters, as well as memory peripheral circuits in the system level … . As a researcher working in the field related to new materials for DRAM cell capacitors, this book offers me a clear and complete view of DRAM technology and its advances, providing not only specifications, requirements, and restrictions but also a necessary deeper understanding of related physics and functionality issues."
—Dr. Milan Tapajna, Institute of Electrical Engineering, Slovak Academy of Sciences

"The main strength of this material is a good overview of all nearly relevant literature on DRAM cell development of the recent years."
—Till Schloesser, Infineon Technologies, Germany

"Quite a comprehensive treatment of regular DRAM technology but it ignores the new demands of wide I/O DRAM and the effects of packaging – e.g. through-silicon vias reducing signal losses and thus lowering power. … definitely a good historical survey and the lists of reference should be very useful to anyone researching the topic."
—Dick James, Chipworks Inc., Ottawa, Ontario, Canada