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Electrochemical Microsystem Technologies




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ISBN 9780415273558
Published September 5, 2002 by CRC Press
592 Pages

 
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Book Description

Driven by the electronics industry, electrochemical technology has rapidly evolved, finding increasing applications in microelectronics, batteries, sensors, materials science, industrial fabrication, corrosion, microbiology, neurobiology and medicine. Electrochemical Microsystem Technologies provides an overview of the technological status; the development of micropatternings and micro-biosensors; and the applications of micropower with electrochemical microsystems.
This book covers a wide spectrum of issues ranging from fundamental electrochemical processes to their applications in micro- and nanofabrication, microanalyses, microsensing, and their interaction with inorganic surfaces and biological systems. The editors provide comprehensive background to unique processes, such as the technological development of miniaturization, microfabrication, thin film deposition, etching, cleaning, planarization, and silicon processing technologies to introduce a wide range of applications in context.
More than 40 internationally recognized industry, research, and medical experts provide insight on the current status and future trends in their fields. They also highlight the impact of applying electrochemical microsystem technologies on industries such as storage and packaging; microelectronics, sensors, and portable electronics; machining, polishing, anodization, and plating technologies in heavy industries; biosensing, biological implant technology, and neurobiology; and cross-disciplinary integrated systems.
Electrochemical Microsystem Technologies is a valuable reference for graduate/postgraduate students, technologists, and researchers working in the field of electrochemical technology.

Table of Contents

FUNDAMENTALS
Electrochemical Microsystem Technologies: Principles
Application for Homogenous Electrochemistry: Measurements of Fast Reaction Kinetics
Fundamentals of Scanning Electrochemical Microscopy
Electrochemical Microcells and Surface Analysis
Application of Optical Micro-Methods and Lasers in Electrochemistry
Nucleation and Growth in Microsystem Technology
MICROPATTERNING
High Resolution Lithography
Advanced Plating Technology for Electronics Packaging
Micro-Electroforming of Miniaturized Devices for Chemical Applications
INTEGRATION OF SYSTEMS
Capacitors and Micropower Systems
Batteries for Micropower Applications
Micro Flow Systems for Chemical and Biochemical Applications
Corrosion of Microsystems
MICROANALYSIS AND MICROSENSORS
Electrochemical Microanalysis
Novel Approaches to Design Silicon-Based Field-Effect Sensors
Miniaturization of Biosensors
Scanning Probe Microscopy as an Analysis Tool
Microelectrode Techniques for Characterization of Advanced Materials for Battery and Sensor Applications
BIOLOGICAL SYSTEMS
Microsystems For Biosensing Nucleic Acids and Immuno Proteins
New Microelectrode Arrays for Biosensing Membrane Electroporation
Multi-Barrelled Ion-Selective Microelectrodes: Measurements of Cell Volume, Membrane Potential, and Intracellular Ion Concentrations in Invertebrate Nerve Cells
Nerve Cells And Lipid Vesicles On Silicon Chips - Considerations On Ionoelectronic Sensors

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