Fabrication of Silicon Microprobes for Optical Near-Field Applications: 1st Edition (Hardback) book cover

Fabrication of Silicon Microprobes for Optical Near-Field Applications

1st Edition

By Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi

CRC Press

192 pages | 130 B/W Illus.

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pub: 2002-01-15
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Description

The development of near-field optics marked a major advance in microscopy and our ability to develop nanoscale technologies. However, the tapered optical fiber widely in use as the optical near-field probe has serious limitations in its fabrication, its optical transmission efficiency, and its use in arrays.

Fabrication of Silicon Microprobes for Optical Near-Field Applications reports on several technological approaches to using silicon micromachining techniques for fabricating microprobes without the drawbacks of conventional optical fiber probes. The authors have developed a simple, effective method for batch-process production of silicon cantilevered probes with apertures as small as 20 nanometers. They have investigated in detail the probes' optical performance characteristics and show how the silicon probes overcome the limitations of the optical fiber probes in terms of production throughput, optical throughput, reproducibility, simplicity of instrumentation, and mechanical performance.

Reviews

"All in all, I found this book interesting, well organized, and easy to understand. Written crisply and to the point, it satisfyingly balances mathematical method with experimental results."

– Pouria Valley, University of Arizona, in IEEE Circuits & Devices Magazine, July/August 2006, Vol. 22, No. 4

Table of Contents

Preface

INTRODUCTION

Introduction

Structure of the Book

References

INTRODUCTION OF NEAR-FIELD OPTICS

Far-Field Light and Diffraction Effect

Concept of Near-Field Optics and Optical Near-Field Microscopy

Instrumentation of Optical Near-Field Imaging

Techniques for Control of the Tip-Sample Distance

Tapered Optical Fiber Based Optical Near-Field Probes

Disadvantages of Optical Fiber Based Probes and Solutions with Silicon Micromachined Probes

References

INTRODUCTION OF SILICON MICROMACHINING TECHNOLOGY

Lithography

Thermal Oxidation of Silicon

Metallization

Silicon Etching

Silicon Oxide Etching

Anodic Bonding and Packaging

References

FABRICATION OF SILICON MICROPROBES FOR OPTICAL NEAR-FIELD APPLICATIONS

Overview of Micromachined Optical Near-Field Probes

Design of the Probes

Principle of the Fabrication Process

Detail of the Fabrication Process

Fabrication Results and Discussion

References

EVALUATION OF THE MICROFABRICATED OPTICAL NEAR-FIELD PROBES

Optical Throughput Measurement

Measurement of Spatial Distribution of the Near-Field Light at the Fabricated Aperture

Polarization Behaviors of the Fabricated Aperture

Static and Dynamic Properties of the Fabricated Cantilevers

Discussion

References

NOVEL PROBES FOR LOCALLY ENHANCING OF NEAR-FIELD LIGHT AND OTHER APPLICATIONS

Fabrication of the Coaxial Apertured Probe

Fabrication of Apertured Probe with a Single Carbon Nano Tube

Fabrication of the Apertured Probe with an Embedded Ag Particle

Fabrication and Characterization of a Hybrid Structure of Optical Fiber and Apertured Cantilever for Optical Near-Field Applications

Fabrication and Characterization of Metallic Contacts in Nanoscale Size for Thermal Profiler and Thermal Recording Probe Array

Initial Results of the Fabrication of Electron Field Emission Devices

Discussion

References

USING FINITE DIFFERENCE TIME DOMAIN METHOD

Introduction

FDTD modeling for optical near-field simulation

Results of the FDTD simulation

References

SUB-WAVELENGTH OPTICAL IMAGING WITH THE FABRICATED PROBES

Introduction

Measurement Setups

Measurement Results

Discussion

References

OPTICAL NEAR-FIELD LITHOGRAPHY

Introduction

Fabrication of Nanoscale Aperture and Slits

Optical Near-Field Patterns Transfer

Grid Pattern Transfer Using Polarized Light

Conclusion

References

OPTICAL NEAR-FIELD RECORDING WITH THE FABRICATED APERTURE ARRAY

Introduction

Concept of the VCSEL/NSOM and Fabrication Process

Results of Fabrication and First Result of Recording

Discussion

References

FUTURE ASPECT AND CONCLUSIONS

Future Aspect

Conclusion of the Work

Subject Index

Subject Categories

BISAC Subject Codes/Headings:
TEC007000
TECHNOLOGY & ENGINEERING / Electrical
TEC019000
TECHNOLOGY & ENGINEERING / Lasers & Photonics
TEC021000
TECHNOLOGY & ENGINEERING / Material Science
TEC027000
TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS