1st Edition

FinFET Devices for VLSI Circuits and Systems




ISBN 9781138586093
Published July 16, 2020 by CRC Press
338 Pages 133 B/W Illustrations

USD $160.00

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Book Description

To surmount the continuous scaling challenges of MOSFET devices, FinFETs have emerged as the real alternative for use as the next generation device for IC fabrication technology. The objective of this book is to provide the basic theory and operating principles of FinFET devices and technology, an overview of FinFET device architecture and manufacturing processes, and detailed formulation of FinFET electrostatic and dynamic device characteristics for IC design and manufacturing. Thus, this book caters to practicing engineers transitioning to FinFET technology and prepares the next generation of device engineers and academic experts on mainstream device technology at the nanometer-nodes.

Table of Contents

1. Introduction
1.1 Fin Field-Effect Transistors
1.2 Overview of MOSFET Devices for Integrated Circuit Manufacturing
1.3 Alternative Device Concepts
1.4 FinFET Devices for VLSI Circuits and Systems
1.5 A Brief History of FinFET Devices
1.6 Summary
References

2. Fundamentals of Semiconductor Physics
2.1 Introduction
2.2 Semiconductor Physics 
2.3 Theory of n-type and p-Type Semiconductors in Contact
2.4 Summary
References

3. Multiple Gate Metal-Oxide-Semiconductor (MOS) System
3.1 Introduction
3.2 Multigate MOS Capacitors at Equilibrium
3.3 MOS Capacitor under Applied Bias
3.4 Multigate MOS Capacitor Systems: Mathematical Analysis
3.5 Quantum Mechanical Effect
3.6 Summary
References

4. Overview of FinFET Device Technology
4.1 Introduction
4.2 FinFET Manufacturing Technology
4.3 Bulk-FinFET Fabrication
4.4 SOI FinFET Process Flow
4.5 Summary
References

5. Long Channel FinFETs
5.1 Introduction
5.2 Basic Features of FinFET Devices
5.3 FinFET Device Operation
5.4 Drain Current Formulation
5.5 Summary
References

6. Small Geometry FinFETs: Physical Effects on Device Performance
6.1 Introduction
6.2 Short-channel Effects on Threshold Voltage
6.3 Quantum Mechanical Effects
6.4 Surface Mobility
6.5 High Field Effects
6.6 Output Resistance
6.7 Summary
References

7. Leakage Currents in FinFETs
7.1 Introduction
7.2 Subthreshold Leakage Currents
7.3 Gate-Induced Drain and Source Leakage Currents
7.4 Impact Ionization Current
7.5 Source-Drain pn-Junction Leakage Current
7.6 Gate Oxide Tunneling Currents
7.7 Summary
References

8. Parasitic Elements in FinFETs
8.1 Introduction
8.2 Source-Drain Parasitic Resistance
8.3 Gate Resistance
8.4 Parasitic Capacitance Elements
8.5 Source-Drain pn-Junction Capacitance
8.6 Summary
References

9. Challenges of FinFET Process and Device Technology
9.1 Introduction
9.2 Process Technology Challenges
9.3 Device Technology Challenges
9.4 Challenges in FinFET Circuit Design
9.5 Summary
References

10. FinFET Compact Modeling for Circuit Simulation
10.1 Introduction
10.2 Compact Device Model
10.3 Common Multiple-Gate Compact FinFET Model
10.4 Dynamic Model
10.5 Process Variability Modeling
10.6 Summary
References

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Author(s)

Biography

Samar K. Saha received a PhD in Physics from Gauhati University, India, and

MS in Engineering Management from Stanford University, CA. Currently, he is an

Adjunct Professor in the Electrical Engineering Department at Santa Clara University,

CA, and Chief Research Scientist at Prospicient Devices, CA. Since 1984, he has

worked in various technical and management positions for National Semiconductor,

LSI Logic, Texas Instruments, Philips Semiconductors, Silicon Storage Technology,

Synopsys, DSM Solutions, Silterra USA, and SuVolta. He has also worked as a

faculty member in the Electrical Engineering Departments at Southern Illinois

University at Carbondale, IL; Auburn University, AL; the University of Nevada at

Las Vegas, NV; and the University of Colorado at Colorado Springs, CO. He has

authored more than 100 research papers. He has also authored one book, Compact

Models for Integrated Circuit Design: Conventional Transistors and Beyond (CRC

Press, 2015); one book chapter on Technology Computer-Aided Design (TCAD),

“Introduction to Technology Computer-Aided Design,” in Technology Computer

Aided Design: Simulation for VLSI MOSFET (C.K. Sarkar, ed., CRC Press, 2013);

and holds 12 US patents. His research interests include nanoscale device and process

architecture, TCAD, compact modeling, devices for renewable energy, and TCAD

and R&D management.

Dr. Saha served as the 2016–2017 President of the Institute of Electrical and

Electronics Engineers (IEEE) Electron Devices Society (EDS) and is currently serving

as the Senior Past President of EDS, J.J. Ebers Award Committee Chair, and

EDS Fellow Evaluation Committee Chair. He is a Fellow of IEEE and a Fellow

of the Institution of Engineering and Technology (IET, UK), and a Distinguished

Lecturer of IEEE EDS. Previously, he has served as the Junior Past President of EDS;

EDS Awards Chair; EDS Fellow Evaluation Committee Member; EDS President-

Elect; Vice President of EDS Publications; an elected member of the EDS Board of

Governors; Editor-In-Chief of IEEE QuestEDS; Chair of EDS George Smith and Paul

Rappaport Awards; Editor of Region 5&6 EDS Newsletter; Chair of EDS Compact

Modeling Technical Committee; Chair of EDS North America West Subcommittee

for Regions/Chapters; a member of the IEEE Conference Publications Committee;

a member of the IEEE TAB Periodicals Committee; and the Treasurer, Vice Chair,

and Chair of the Santa Clara Valley-San Francisco EDS chapter.

Dr. Saha served as the head guest editor for the IEEE Transactions on

Electron Devices (T-ED) Special Issues (SIs) on Advanced Compact Models and

45-nm Modeling Challenges and Compact Interconnect Models for Giga Scale

Integration; and as a guest editor for the T-ED SI on Advanced Modeling of Power

Devices and their Applications and the IEEE Journal of Electron Devices

Society (J-EDS) SI on Flexible Electronics from the Selected Extended Papers at

2018 IFETC. He has also served as a member of the editorial board of the World

Journal of Condensed Matter Physics (WJCMP), published by the Scientific

Research Publishing (SCIRP).