Introduction
Laser Theory and Operation
Brief Review of Laser Physics
CO2 Lasers
Solid-State Nd3+ Lasers
Excimer Lasers
Fiber Lasers
Disk Lasers
Ultrashort Pulse (USP) Lasers
Comparisons of Laser Sources
Optics
Optics
Beam Delivery Systems—Imaging and Focusing
Steps to an Effective Optical Setup
Light–Material Interaction
Photoablation and Material Interaction with UV Light
Thermal Effects
Taper
Fluence
System Integration
Processing System Considerations
General Requirements
Part Viewing Systems
Motion Control
Part Handling
Laser Support Systems
Software
Safety
Discussion of Some Processing Techniques
Aligning to Fiducials
Laser Drilling Large Numbers of Really Small, High-Aspect Ratio Holes
Gas Assist
Micromarking
Patterning Thin Films
Multiple Hole Drilling Using Galvos
In-Volume Selective Laser Etching (ISLE)
Applications
Microelectronics and Semiconductors
Medical Devices
Defense/Aerospace
Renewable Energy
Other
Materials
Metals
Ceramics
Glasses
Silicon and Gallium Arsenide
Polymers
Diamond
Metrology and Cleaning
Metrology
Postlaser Cleaning
Conclusion
Appendix: Additional Reading
Index
Biography
Ronald Schaeffer is the chief executive officer of PhotoMachining, Inc. He earned a PhD in physical chemistry from Lehigh University and has been involved in laser manufacture and materials processing for more than 25 years. He currently writes a column for MICROmanufacturing and is on the editorial advisory board of Industrial Laser Solutions.
… a very usable guide for those working in the field of microfabrication machining. And I expect the well-edited index will prove to be a frequently used aid to those working in the technology.
—David Belforte, Industrial Laser Solutions for Manufacturing, July 2012
