Fundamentals of Laser Micromachining: 1st Edition (Hardback) book cover

Fundamentals of Laser Micromachining

1st Edition

By Ronald Schaeffer

CRC Press

260 pages | 163 B/W Illus.

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Hardback: 9781439860557
pub: 2012-04-12
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Description

Due to their flexible and efficient capabilities, lasers are often used over more traditional machining technologies, such as mechanical drilling and chemical etching, in manufacturing a wide variety of products, from medical implants, gyroscopes, and drug delivery catheters to aircraft engines, printed circuit boards, and fuel cells. Fundamentals of Laser Micromachining explains how laser technology is applied to precision micromachining. The book combines background on physics, lasers, optics, and hardware with analysis of markets, materials, and applications. It gives sufficient theoretical background for readers to understand basic concepts while including a further reading appendix for those interested in more detailed theoretical discussions.

After reviewing laser history and technology, the author compares available laser sources, including CO2, excimer, Nd:YAG, fiber, and short pulse. He also addresses topics crucial to obtaining good processing results, such as IR and UV material–photon interaction, basic optical components, and system integration. The text goes on to cover real-world applications in the medical, microelectronics, aerospace, and other fields. It concludes with details on processing many common materials, such as metals, silicon, ceramics, and glasses.

For engineers and project managers, this book provides the foundation to achieve cost-effectiveness, the best edge quality, and the highest resolution in small-scale industrial laser machining. It will help you select the correct kind of laser for your application and identify real opportunities for growth in the marketplace.

Reviews

… a very usable guide for those working in the field of microfabrication machining. And I expect the well-edited index will prove to be a frequently used aid to those working in the technology.

—David Belforte, Industrial Laser Solutions for Manufacturing, July 2012

Table of Contents

Introduction

Laser Theory and Operation

Brief Review of Laser Physics

CO2 Lasers

Solid-State Nd3+ Lasers

Excimer Lasers

Fiber Lasers

Disk Lasers

Ultrashort Pulse (USP) Lasers

Comparisons of Laser Sources

Optics

Optics

Beam Delivery Systems—Imaging and Focusing

Steps to an Effective Optical Setup

Light–Material Interaction

Photoablation and Material Interaction with UV Light

Thermal Effects

Taper

Fluence

System Integration

Processing System Considerations

General Requirements

Part Viewing Systems

Motion Control

Part Handling

Laser Support Systems

Software

Safety

Discussion of Some Processing Techniques

Aligning to Fiducials

Laser Drilling Large Numbers of Really Small, High-Aspect Ratio Holes

Gas Assist

Micromarking

Patterning Thin Films

Multiple Hole Drilling Using Galvos

In-Volume Selective Laser Etching (ISLE)

Applications

Microelectronics and Semiconductors

Medical Devices

Defense/Aerospace

Renewable Energy

Other

Materials

Metals

Ceramics

Glasses

Silicon and Gallium Arsenide

Polymers

Diamond

Metrology and Cleaning

Metrology

Postlaser Cleaning

Conclusion

Appendix: Additional Reading

Index

About the Author

Ronald Schaeffer is the chief executive officer of PhotoMachining, Inc. He earned a PhD in physical chemistry from Lehigh University and has been involved in laser manufacture and materials processing for more than 25 years. He currently writes a column for MICROmanufacturing and is on the editorial advisory board of Industrial Laser Solutions.

Subject Categories

BISAC Subject Codes/Headings:
SCI055000
SCIENCE / Physics
TEC019000
TECHNOLOGY & ENGINEERING / Lasers & Photonics
TEC020000
TECHNOLOGY & ENGINEERING / Manufacturing
TEC021000
TECHNOLOGY & ENGINEERING / Material Science