Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set: 3rd Edition (Hardback) book cover

Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set

3rd Edition

By Marc J. Madou

CRC Press

1,992 pages | 1887 Color Illus.

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Hardback: 9780849331800
pub: 2011-08-01
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Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options.

The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.


"… the alpha and omega textbook of micro and nanofabrication and technology. … Madou’s explanations often provide new perspectives to those who are more experienced. … this feat of compressing a half century of science and engineering into one set of books makes them useful for years to come. The volumes can easily and aptly serve as course resources for students or as reference books for professionals. Summing Up: Recommended."

—CHOICE Magazine

"… offers the widest and yet the most detailed coverage of all essential and fundamental aspects of microfabrication and nanotechnology. The author has done an excellent and remarkable job in synthesizing such diverse material under a single umbrella."

—Suman Chakraborty, IIT Kharagpur, India

"Once again, Professor Madou has made an incredible contribution to the MEMS/NEMS global community in writing this series of books."

—Nico de Rooij, Director, Institute of Microengineering, EPFL, Switzerland

"… [the new three-volume format] has the potential to become a 'classic' just like the one-volume predecessor… easy to read, and I found some concepts explained in ways I hadn’t heard before… Very ambitious, very informative, very good for teaching!"

—Jorg P. Kutter, Technical University of Denmark

Table of Contents

Volume I


Historical Note: The Ascent of Silicon, MEMS, and NEMS


Quantum Mechanics and the Band Theory of Solids

Silicon Single Crystal Is Still King



Electrochemical and Optical Analytical Techniques


Volume II

Part I: Lithography

Introduction to Part I


Next-Generation Lithographies and Lithography Research

Part II: Pattern Transfer with Subtractive Techniques

Introduction to Part II

Dry Etching

Wet Chemical Etching and Wet Bulk MicromachiningPools as Tools

Thermal Energy-Based Removing

MechanicalEnergy-Based Removing

Part III: Pattern Transfer with Additive Techniques

Introduction to Part III

Physical and Chemical Vapor DepositionThin Film Properties and Surface Micromachining

Chemical, Photochemical, and Electrochemical Forming Techniques

Thermal Energy-Based Forming TechniquesThermoforming

10 Micromolding TechniquesLIGA


Volume III

Part I: From Traditional Manufacturing to Nanotechnology

Introduction to Part I

Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing Compared

Nature as an Engineering Guide: Biomimetics

Nanotechnology: Top-Down and Bottom-Up Manufacturing Approaches Compared

Packaging, Assembly, and Self-Assembly

Selected Materials and Processes for MEMS and NEMS

6 Metrology and MEMS/NEMS Modeling 285

Part II: Scaling Laws, Actuators, and Power and Brains in Miniature Devices

Introduction to Part II

Scaling Laws


Power and Brains in Miniature Devices

Part III: Miniaturization Application

Introduction to Part III

MEMS and NEMS Applications


Subject Categories

BISAC Subject Codes/Headings:
TECHNOLOGY & ENGINEERING / Electronics / Microelectronics