Handbook of Optical Metrology: Principles and Applications, 1st Edition (Paperback) book cover

Handbook of Optical Metrology

Principles and Applications, 1st Edition

Edited by Toru Yoshizawa

CRC Press

744 pages | 607 B/W Illus.

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The field of optical metrology offers a wealth of both practical and theoretical accomplishments, and can cite any number of academic papers recording such. However, while several books covering specific areas of optical metrology do exist, until the pages herein were researched, written, and compiled, the field lacked for a comprehensive handbook, one providing an overview of optical metrology that covers practical applications as well as fundamentals.

Carefully designed to make information accessible to beginners without sacrificing academic rigor, the Handbook of Optical Metrology: Principles and Applications discusses fundamental principles and techniques before exploring practical applications.

With contributions from veterans in the field, as well as from up-and-coming researchers, the Handbook offers 30 substantial and well-referenced chapters. In addition to the introductory matter, forward-thinking descriptions are included in every chapter that make this a valuable reference for all those involved with optical metrology.

Table of Contents

Fundamentals of Optical Elements and Devices

Light Sources

Natalia Dushkina

Lenses, Prisms, and Mirrors

Peter R. Hall

Optoelectronic Sensors

Motohiro Suyama

Optical Devices and Optomechanical Elements

Akihiko Chaki and Kenji Magara

Fundamentals of Principles and Techniques for Metrology

Propagation of Light

Natalia Dushkina


David A. Page


Giancarlo Pedrini

Speckle Methods and Applications

Nandigana Krishna Mohan

Moire Metrology

Lianhua Jin

Optical Heterodyne Measurement Method

Masao Hirano


Toru Yoshizawa

Light Scattering

Lev T. Perelman


Michael Shribak

Near-Field Optics

Wenhao Huang, Xi Li, and Guoyong Zhang

Length and Size

René Schödel

Practical Applications


Akiko Hirai, Mariko Kajima, and Souichi Telada

Straightness and Alignment

Ruedi Thalmann


Toshiyuki Takatsuji and Youichi Bitou

Surface Profi lometry

Toru Yoshizawa and Toshitaka Wakayama

Three-Dimensional Shape Measurement

Frank Chen, Gordon M. Brown, and Mumin Song

Fringe Analysis

Jun-ichi Kato


Nobuo Kochi

Optical Methods in Solid Mechanics

Anand Asundi

Optical Methods in Flow Measurement

Sang Joon Lee


Baoliang Wang

Birefringence Measurement

Yukitoshi Otani


Hiroyuki Fujiwara

Optical Thin Film and Coatings

Cheng-Chung Lee and Shigetaro Ogura

Film Surface and Thickness Profi lometry

Katsuichi Kitagawa

On-Machine Measurements

Takashi Nomura and Kazuhide Kamiya

Subject Categories

BISAC Subject Codes/Headings:
SCIENCE / Optics