Handbook of Thin Film Process Technology: 98/1 Reactive Sputtering, 1st Edition (Hardback) book cover

Handbook of Thin Film Process Technology

98/1 Reactive Sputtering, 1st Edition

By David A Glocker

CRC Press

90 pages

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Hardback: 9781315893686
pub: 2017-11-29
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The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume is a special issue on reactive sputtering which will be of interest to a wide range of industrial and academic researchers in addition to owners of the main Handbook. Some recent developments in the reactive sputtering field are covered, including unbalanced magnetron sputtering and pulsed reactive sputtering. The articles contain a wealth of practical information relating to applications, practice and manufacturing techniques.

Table of Contents

1. Physical Depositon Techniques 2. Chemical Depositon Techniques 3. Processing Technologies 4. Real-Time Diagnostics 5. Surface Modification in Vacuum 6. Superlattices and Multi-Layered Structures 7. Materials

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