1st Edition
Handbook of Thin Film Process Technology 98/2 Recipes for Optical Materials
By D Glocker
Copyright 1998
135 Pages
by
CRC Press
135 Pages
by
CRC Press
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The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume presents additional recipe-type information (i.e. important deposition system details and process parameters) for optical materials.
1. Physical Depositon Techniques 2. Chemical Depositon Techniques 3. Processing Technologies 4. Real-Time Diagnostics 5. Surface Modification in Vacuum 6. Superlattices and Multi-Layered Structures 7. Materials
Biography
D Glocker
