1st Edition
Industrial Plasma Engineering Volume 2: Applications to Nonthermal Plasma Processing
By J Reece Roth
Copyright 2001
658 Pages
by
CRC Press
658 Pages
by
CRC Press
658 Pages
by
CRC Press
Also available as eBook on:
Written by a leading expert in the field, Industrial Plasma Engineering, Volume 2: Applications to Nonthermal Plasma Processing provides a background in the principles and applications of low temperature, partially ionized Lorentzian plasmas that are used industrially. The book also presents a description of plasma-related processes and devices that are of commercial interest. The text is suitable... Read more
Surface Interactions in Plasma Processing. Atmospheric Pressure Plasma Sources. Vacuum Plasma Sources. Plasma Reactors for Plasma Processing. Specialized Techniques and Devices for Plasma Processing. Parametric Plasma Effects on Plasma Processing. Diagnostics for Plasma Processing. Plasma Treatment of Surfaces. Surface Modification by Implantation and Diffusion. Thin Film Deposition by Evaporative Condensation and Sputtering. Plasma Chemical Vapor Deposition (PCVD). Plasma Etching.
Biography
J Reece Roth Department of Electrical and Computer Engineering University of Tennessee, Knoxville
