352 Pages
217 B/W Illustrations
by
CRC Press
352 Pages
217 B/W Illustrations
by
CRC Press
Also available as eBook on:
This book covers theoretical and practical aspects of all major steps in the fabrication sequence. This book can be used conveniently in a semester length course on integrated circuit fabrication. This text can also serve as a reference for practicing engineer and scientist in the semiconductor industry. IC Fabrication are ever demanding of technology in rapidly growing industry growth... Read more
1. Introduction to Silicon Wafer Processing 2. Epitaxy 3. Oxidation 4. Lithography 5. Etching 6. Diffusion 7. Ion Implantation 8. Film Deposition: Dielectric, Polysilicon and Metallization 9. Packaging 10. VLSI Process Integration
Biography
Kumar Shubham, Delhi Technical Campus, Uttar Pradesh, India
Ankaj Gupta, Delhi Technical Campus, Uttar Pradesh, India
