Since its invention, the integrated circuit has necessitated new process modules and numerous architectural changes to improve application performances, power consumption, and cost reduction. Silicon CMOS is now well established to offer the integration of several tens of billions of devices on a chip or in a system. At present, there are important challenges in the introduction of heterogeneous co-integration of materials and devices with the silicon CMOS 2D- and 3D-based platforms. New fabrication techniques allowing strong energy and variability efficiency come in as possible players to improve the various figures of merit of fabrication technology.
Integrated Nanodevice and Nanosystem Fabrication: Breakthroughs and Alternatives is the second volume in the Pan Stanford Series on Intelligent Nanosystems. The book contains 8 chapters and is divided into two parts, the first of which reports breakthrough materials and techniques such as single ion implantation in silicon and diamond, graphene and 2D materials, nanofabrication using scanning probe microscopes, while the second tackles the scaling and architectural aspects of silicon devices through HiK scaling for nanoCMOS, nanoscale epitaxial growth of group IV semiconductors, design for variability co-optimization in SOI FinFETs, and nanowires for CMOS and diversifications.
Table of Contents
Introduction: Will new materials, fabrication and architecture schemes emerge for CMOS survival?
Deterministic single-ion implantation method for quantum processing in silicon and diamond
Takahiro Shinada , Enrico Prati, Takashi Tanii
Graphene and two-dimensional materials : extending silicon technology for the future?
Andreas Bablich, Satender Kataria, Vikram Passi, Max C. Lemme
Nanofabrication using scanning probe microscopes
High-k dielectric scaling for nano CMOS technology
Hei Wong, Takamasa Kawanago, Kuniyuki Kakushima, Hiroshi Iwai
Nanometer scale epitaxial growth of group IV semiconductors
TCAD-based design technology co-optimization for variability in nanoscale SOI FinFETs
Xingsheng Wang, Vihar P. Georgiev, Fikru Adamu-Lema, Louis Gerrer, Salvatore M. Amoroso, Asen Asenov
Nanowires for CMOS and diversifications
Thomas Ernst, Sylvain Barraud
Simon Deleonibus retired from CEA-LETI on January 1, 2016, as chief scientist after 30 years of research on the architecture of micro- and nanoelectronic devices. Before joining CEA-LETI, he was with Thomson Semiconductors (1981-1986), where he developed and transferred to production advanced microelectronic devices and products. He obtained his PhD in applied physics from Paris University (1982). He is a visiting professor at the Tokyo Institute of Technology (Tokyo, Japan) since 2014, National Chiao Tung University (Hsinchu, Taiwan) since 2015, and the Chinese Academy of Science (Beijing, PRC) since 2016 .
Prof. Deleonibus is distinguished research director of the CEA since 2002, distinguished lecturer at IEEE since 2004, fellow of the IEEE since 2006, and fellow of the Electrochemical Society since 2015. He was awarded the titles of Chevalier de l’Ordre National du Mérite (2004) and Chevalier de l’Ordre des Palmes Académiques (2011), as well as the 2005 Grand Prix de l’Académie des Technologies. He is a member of the ITRS since 1998, the European Research Council Panel since 2007, and the Nanosciences Foundation Board of Trustees since 2007. He was associate editor of the IEEE Transactions on Electron Devices (2008-2014) and a member of the IEEE Electron Devices Society Board of Governors (2009-2011 and 2012-2014), where he has been reelected for 2016-2018. Currently he is secretary of IEEE EDS (2016-2017) and chair of IEEE EDS Region 8 SRC (2015-2016).
"A timely book that showcases some of the most important advances in nanodevices and nanofabrication, written by world-renowned experts."
Prof. H.-S. Philip Wong, Stanford University, USA
"This seven-chapter book reviews important new trends in nanotechnology and nanodevices, ranging from single-ion implantation and two-dimensional materials, such as graphene, to nanofabrication with a scanning probe microscope. The second part of the book deals with unconventional approaches to scaling nanoscale CMOS devices and to reducing device variability. Taken together, the book provides a wealth of information for graduate students and nanotechnology researchers, as well as a good insight into the future developments for engineers involved with nanosystem design and fabrication."
Prof. George Celler, Rutgers University, USA
"In this book, the authors address various advanced nanofabrication techniques and device issues for nano-CMOS extension. The topics are timely and their description is well balanced between innovation and practicality, as the authors evaluate each technique on the basis of the current CMOS technology. I strongly recommend the book to graduate students, researchers, and engineers in the industry and academia."
Prof. Byung Gook Park, Seoul National University, Korea