1st Edition
Luminous Chemical Vapor Deposition and Interface Engineering
By Hirotsugu Yasuda
Copyright 2004
838 Pages
by
CRC Press
840 Pages
by
CRC Press
840 Pages
by
CRC Press
Also available as eBook on:
Providing in-depth coverage of the technologies and various approaches, Luminous Chemical Vapor Deposition and Interface Engineering showcases the development and utilization of LCVD procedures in industrial scale applications. It offers a wide range of examples, case studies, and recommendations for clear understanding of this innovative science. The book comprises four parts. Part 1 describes... Read more
Fundamentals of Luminous Chemical Vapor Deposition. Operation of Luminous Chemical Vapor Deposition and Treatment. Fundamentals of Surface and Interface. Interface Engineering.
Biography
Hirotsugu Yasuda






