As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled.
The third volume, MEMS: Applications, offers a broad overview of current, emerging, and possible future MEMS applications. It surveys inertial sensors, micromachined pressure sensors, surface micromachined devices, microscale vacuum pumps, reactive control for skin-friction reduction, and microchannel heat sinks, among many others. Two new chapters discuss microactuators and nonlinear electrokinetic devices. This book is vital to understanding the current and possible capabilities of MEMS technologies.
MEMS: Applications comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology.
Table of Contents
Introduction. Inertial Sensors. Micromachined Pressure Sensors: Devices, Interface Circuits, and Performance Limit. Surface Micromachined Devices. Microactuators. Sensors and Actuators for Turbulent Flows. Mibrorobotics. Microscale Vacuum Pumps. Nonlinear Electrokinetic Devices. Micro-Droplet Generators. Micro-Heat-Pipes and Micro-Heat- Spreaders. Microchannel Heat Sinks. Flow Control. The Future: Reactive Control for Skin-Friction Reduction. Towards MEMS Autonomous Control of Free-Shear Flows. Fabrication Technologies for Nanoeletromechanical Systems. Molecular Self-Assembly: Fundamental Concepts and Applications.