As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled.
The second volume, MEMS: Design and Fabrication, details the techniques, technologies, and materials involved in designing and fabricating MEMS devices. It begins with an overview of MEMS materials and then examines in detail various fabrication and manufacturing methods, including LIGA and macromolding, X-ray based fabrication, EFAB® technology, and deep reactive ion etching. This book includes three new chapters on polymeric-based sensors and actuators, diagnostic tools, and molecular self-assembly. It is a thorough guide to the important aspects of design and fabrication.
MEMS: Design and Fabrication comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology.
Table of Contents
Introduction. Materials for Microelectromechanical Systems. MEMS Fabrication. LIGA and Micromolding. X-Ray Based Fabrication. EFAB Technology and Application. Single-Crystal Silicon Carbide MEMS: Fabrication, Characterization and Reliability. Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide. Polymer Microsystems: Materials and Fabrications. Optical Diagnostics to Investigate the Entrance Length in Microchannels. Microfabricated Chemical Sensors for Aerospace Applications. Packaging of Harsh Environment MEMS Devices.