MEMS : Fundamental Technology and Applications book cover
1st Edition

Fundamental Technology and Applications

ISBN 9781138072305
Published March 29, 2017 by CRC Press
478 Pages 369 B/W Illustrations

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Book Description

The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world.

The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including:

  • Thin-film integrated passives as an alternative to discrete passives
  • The possibility of piezoelectric MEMS
  • Solutions for MEMS gyroscopes
  • Advanced interconnect technologies
  • Ambient energy harvesting
  • Bulk acoustic wave resonators
  • Ultrasonic receiver arrays using MEMS sensors
  • Optical MEMS-based spectrometers
  • The integration of MEMS resonators with conventional circuitry
  • A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns
  • Wireless microactuators to enable implantable MEMS devices for drug delivery
  • MEMS technologies for tactile sensing and actuation in robotics
  • MEMS-based micro hot-plate devices
  • Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring
  • Sensors using passive acousto-electric devices in wired and wireless systems

Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.

Table of Contents

Breakthrough Technology

Microsystems to Nano-Microsystems: A Technological Breakthrough
Hauden Daniel

HfO2-Based High-κ Dielectrics for Use in MEMS Applications
Bing Miao, Rajat Mahapatra, Nick Wright, and Alton Horsfall

Piezoelectric Thin Films for MEMS Applications
Isaku Kanno

CMOS Systems and Interfaces for sub-deg/hr Microgyroscopes
Ajit Sharma, Mohammad Faisal Zaman, and Farrokh Ayazi

Bulk Acoustic Wave Gyroscopes
Houri Johari

Mechanically Flexible Interconnects and TSVs: Applications in CMOS/MEMS Integration
Hyung Suk Yang, Paragkumar Thadesar, Chaoqi Zhang, and Muhannad Bakir

Modeling of Piezoelectric MEMS Vibration Energy Harvesters
Marcin Marzencki and Skandar Basrour

Interface Circuits for Capacitive MEMS Gyroscopes
Hongzhi Sun and Huikai Xie

Electromechanical Loops for High-Performance and Robust Gyroscope System Design
Vikas Choudhary, Abhinav Dikshit, Anjan Kumar, Deva Phanindra Kumar, Saravanan Kamatchi, and Nemai Biswas

MEMS-Based Novel Applications

Bulk Acoustic Wave Resonators for Mobile Communication Systems
Sumy Jose

Wideband Ultrasonic Transmitter and Sensor Array for In-Air Applications
J.R. Gonzalez, Mohamed Saad, and Chris J. Bleakley

MEMS-Based Lamellar Grating Fourier Transform Spectrometers
Hongbin Yu, Guangya Zhou, and Fook Siong Chau

Microelectromechanical Resonators for RF Applications
Frederic Nabki, Tomas A. Dusatko, and Mourad N. El-Gamal

Rigid Body Motion Capturing by Means of Wearable Inertial and Magnetic MEMS Sensor Assembly—From Reconstitution of the Posture toward Dead Reckoning: An Application in Bio-Logging
Hassen Fourati, Noureddine Manamanni, Lissan Afilal, and Yves Handrich

Radio-Controlled Wireless MEMS Actuators and Applications
Mohamed Sultan Mohamed Ali and Kenichi Takahata

Advanced MEMS Technologies for Tactile Sensing and Actuation
M. Amato, Massimo De Vittorio, and S. Petroni

MEMS-Based Micro Hot-Plate Devices
Jürgen Hildenbrand, Andreas Greiner, and Jan G. Korvink

A Wireless Sensor Networks Enabled Inertial Sensor
Yao-Chiang Kan

Passive Radio-Frequency Acoustic Sensors and Systems for Wired and Wireless Applications
Sylvain Ballandras, Gilles Martin, Jean-Michel Friedt, Victor Plessky, Virginie Blondeau-Pâtissier, William Daniau, Thomas Baron, Luc Chommeloux, Stéphane Tourette, Jean-François Leguen, Bruno François, Christophe Droit, Meddy Vanotti, Marc Lamothe, David Rabus, Nicolas Chrétien, and Emile Carry


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Vikas Choudhary is currently a senior manager of MEMS and Sensor Technology Group at Analog Devices, where he is involved in design and management of products for Inertial MEMS. He also manages a team of engineers involved in the design of high-performance precision analog-to-digital converters. Vikas has more than 18 years of experience in the semiconductor industry, including as the architect and lead designer for several RFIC subsystems such as 802.16e and 802.11n. He has held various management and design positions at PMC-Sierra, Inc., Texas Instruments, and STMicroelectronics. He has three issued patents. His current research interests are in the field of applied signal processing for high-performance analog circuits and systems.

Krzysztof (Kris) Iniewski manages R&D at Redlen Technologies, Inc., a startup company in Vancouver, Canada. He is also the president of CMOS Emerging Technologies Research Inc., an organization of high-tech events covering communications, microsystems, optoelectronics, and sensors. Dr. Iniewski has held numerous faculty and management positions at the University of Toronto, University of Alberta, Simon Fraser University, and PMC-Sierra, Inc. He has published more than 100 research papers in international journals and conferences. He holds 18 international patents granted in the United States, Canada, France, Germany, and Japan. He is a frequent invited speaker, has consulted for multiple organizations internationally, and has written and edited several books.


"The book editors have managed to assemble a group of extraordinary authors to provide their expertise to this book. While giving an excellent overview of the history and the state of the art of MEMS technology, this book also focuses on current trends and topics such as gyroscopes that currently experience significant and increasing popularity in research and in industry. It is well written and the material is presented in a well-structured way making it easily accessible to any reader with a technical background."
—Boris Stoeber, The University of British Columbia, Vancouver, Canada