1st Edition

MEMS Introduction and Fundamentals

Edited By Mohamed Gad-el-Hak Copyright 2005
492 Pages 9 Color & 248 B/W Illustrations
by CRC Press

488 Pages
by CRC Press

As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a... Read more
Introduction; Mohamed Gad-el-Hak
Scaling of Micromechanical Devices; William Trimmer and Robert H. Stroud
Mechanical Properties of MEMS Materials; William N. Sharpe, Jr.
Flow Physics; Mohamed Gad-el-Hak
Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains; Robert M. Kirby, George Em Karniadakis, Oleg Mikulchenko, and Kartikeya Mayaram
Molecular-Based Microfluidic Simulation Models; Ali Beskok
Hydrodynamics of Small-Scale Internal Gaseous Flows; Nicolas G. Hadjiconstantinou
Burnett Simulations of Flows in Microdevices; Ramesh K. Agarwal and Keon-Young Yun
Lattice Boltzmann Simulations of Slip Flows in Microchannels; Ramesh K. Agarwal
Liquid Flow in Microchannels; Kendra V. Sharp, Ronald J. Adrian, Juan G. Santiago, and Joshua I. Molho
Lubrication in MEMS; Kenneth Breuer
Physics of Thin Liquid Films; Alexander Oron
Bubble/Drop Transport in Microchannels; Hsueh-Chia Chang
Fundamentals of Control Theory; J. William Goodwine
Model-Based Flow Control for Distributed Architectures; Thomas R. Bewley
Soft Computing in Control; Mihir Sen and Bill Goodwine
Index

Biography

Mohamed Gad-el-Hak