MEMS: Introduction and Fundamentals, 1st Edition (Hardback) book cover

MEMS

Introduction and Fundamentals, 1st Edition

Edited by Mohamed Gad-el-Hak

CRC Press

488 pages | 9 Color Illus. | 248 B/W Illus.

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pub: 2005-11-29
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Description

As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled.

The first of three volumes, MEMS: Introduction and Fundamentals covers the theoretical and conceptual underpinnings of the field, emphasizing the physical phenomena that dominate at the micro-scale. It also explores the mechanical properties of MEMS materials, modeling and simulation of MEMS, control theory, and bubble/drop transport in microchannels. Chapters were updated where necessary, and the book also includes two new chapters on microscale hydrodynamics and lattice Boltzmann simulations. This volume builds a strong foundation for further study and work in the MEMS field.

MEMS: Introduction and Fundamentals comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology.

Table of Contents

Introduction; Mohamed Gad-el-Hak

Scaling of Micromechanical Devices; William Trimmer and Robert H. Stroud

Mechanical Properties of MEMS Materials; William N. Sharpe, Jr.

Flow Physics; Mohamed Gad-el-Hak

Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains; Robert M. Kirby, George Em Karniadakis, Oleg Mikulchenko, and Kartikeya Mayaram

Molecular-Based Microfluidic Simulation Models; Ali Beskok

Hydrodynamics of Small-Scale Internal Gaseous Flows; Nicolas G. Hadjiconstantinou

Burnett Simulations of Flows in Microdevices; Ramesh K. Agarwal and Keon-Young Yun

Lattice Boltzmann Simulations of Slip Flows in Microchannels; Ramesh K. Agarwal

Liquid Flow in Microchannels; Kendra V. Sharp, Ronald J. Adrian, Juan G. Santiago, and Joshua I. Molho

Lubrication in MEMS; Kenneth Breuer

Physics of Thin Liquid Films; Alexander Oron

Bubble/Drop Transport in Microchannels; Hsueh-Chia Chang

Fundamentals of Control Theory; J. William Goodwine

Model-Based Flow Control for Distributed Architectures; Thomas R. Bewley

Soft Computing in Control; Mihir Sen and Bill Goodwine

Index

About the Series

Mechanical and Aerospace Engineering Series

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Subject Categories

BISAC Subject Codes/Headings:
TEC008070
TECHNOLOGY & ENGINEERING / Electronics / Microelectronics