1st Edition
MEMS Silicon Oscillating Accelerometers and Readout Circuits
Edited By Yong Ping Xu
Copyright 2018
312 Pages
by
River Publishers
312 Pages
by
River Publishers
312 Pages
by
River Publishers
Also available as eBook on:
Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input... Read more
MEMS Silicon Oscillating Accelerometers and Readout Circuits
Biography
Yong Ping Xu
