MEMS and NEMS: Systems, Devices, and Structures, 1st Edition (Hardback) book cover


Systems, Devices, and Structures, 1st Edition

By Sergey Edward Lyshevski

CRC Press

461 pages | 151 B/W Illus.

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Hardback: 9780849312625
pub: 2002-01-18
eBook (VitalSource) : 9781315220246
pub: 2018-10-03
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The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic gates, actuators and sensors.

MEMS and NEMS: Systems, Devices, and Structures is designed to help you meet those challenges and solve fundamental, experimental, and applied problems. Written from a multi-disciplinary perspective, this book forms the basis for the synthesis, modeling, analysis, simulation, control, prototyping, and fabrication of MEMS and NEMS. The author brings together the various paradigms, methods, and technologies associated with MEMS and NEMS to show how to synthesize, analyze, design, and fabricate them. Focusing on the basics, he illustrates the development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization.

The applications of MEMS and NEMS in areas such as biotechnology, medicine, avionics, transportation, and defense are virtually limitless. This book helps prepare you to take advantage of their inherent opportunities and effectively solve problems related to their configurations, systems integration, and control.


"This book … provides an excellent introduction to MEMS and NEMS systems, devices, structures, and fabrication. …its main strength is in the mathematical models derived for the various devices covered in the text. …[It includes] a good overview of practical technology currently in use. …The book is an excellent place to begin studying MEMS and NEMS."

-IEEE Electrical Insulation Magazine, Vol. 20, No. 4, July/Aug. 2004

Table of Contents

Overview and Introduction

New Trends in Engineering and Science: Micro- and Nanoscale Systems

Introduction to Design of MEMS and NEMS

Biological and Biosystems Analogies

Overview of Nano- and Microelectromechanical Systems

Applications of Micro- and Nanoelectromechanical Systems

Micro- and Nanoelectromechanical Systems

Synergetic Paradigms in MEMS

MEMS and NEMS Architecture

Fundamentals of MEMS Fabrication

Introduction and Description of Basic Processes

Microfabrication and Micromachining of ICs, Microstructures, and Microdevices

Devising and Synthesis of MEMS AND NEMS

MEMS Motion Microdevices Classifier and Synthesis

Nanoelectromechanical Systems

Modeling of Micro- and Nanoscale Electromechanical Systems, Devices, and Structures

Introduction to Modeling, Analysis, and Simulation

Electromagnetics and its Application for MEMS and NEMS

Induction Micromachines

Synchronous Microtransducers

Microscale Permanent-Magnet Stepper Micromotors


Fundamentals of Modeling of Electromagnetic Radiating Energy Microdevices

Classical Mechanics and its Application

Thermoanalysis and Heat Equation

Nanosystems, Quantum Mechanics, and Mathematical Models

Atomic Structures and Quantum Mechanics

Molecular and Nanostructure Dynamics

Molecular Wires and Molecular Circuits

Control of Microelectromechanical Systems

Introduction to Microelectromechanical Systems Control

Lyapunov Stability Theory

Control of Microelectromechanical Systems

Intelligent Control of MEMS

Hamilton-Jacobi Theory and Quantum Mechanics

Case Studies: Synthesis, Analysis, Fabrication, and Computer-Aided Design of MEMS


Design and Fabrication

Analysis of Translational Microtransducers

Single-Phase Reluctance Micromotors: Modeling, Analysis, and Control

Three-Phase Synchronous Reluctance Micromotors


Magnetization Dynamics of Thin Films

Microstructures and Microtransducers With Permanent Magnets: Micromirror Actuators

Reluctance Electromagnetic Micromotors

Micromachined Polycrystalline Silicon Carbide Micromotors

Axial Electromagnetic Micromotors

Synergetic Computer-Aided Design of MEMS


Each chapter also includes a References section.

Keywords: Nanoscience, Nanotechnology

About the Series

Nano- and Microscience, Engineering, Technology and Medicine

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Subject Categories

BISAC Subject Codes/Headings:
TECHNOLOGY & ENGINEERING / Electronics / Microelectronics