1st Edition

MEMS and NEMS
Systems, Devices, and Structures




ISBN 9780849312625
Published January 18, 2002 by CRC Press
461 Pages 151 B/W Illustrations

USD $190.00

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Book Description

The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic gates, actuators and sensors.

MEMS and NEMS: Systems, Devices, and Structures is designed to help you meet those challenges and solve fundamental, experimental, and applied problems. Written from a multi-disciplinary perspective, this book forms the basis for the synthesis, modeling, analysis, simulation, control, prototyping, and fabrication of MEMS and NEMS. The author brings together the various paradigms, methods, and technologies associated with MEMS and NEMS to show how to synthesize, analyze, design, and fabricate them. Focusing on the basics, he illustrates the development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization.

The applications of MEMS and NEMS in areas such as biotechnology, medicine, avionics, transportation, and defense are virtually limitless. This book helps prepare you to take advantage of their inherent opportunities and effectively solve problems related to their configurations, systems integration, and control.

Table of Contents

Overview and Introduction
New Trends in Engineering and Science: Micro- and Nanoscale Systems
Introduction to Design of MEMS and NEMS
Biological and Biosystems Analogies
Overview of Nano- and Microelectromechanical Systems
Applications of Micro- and Nanoelectromechanical Systems
Micro- and Nanoelectromechanical Systems
Synergetic Paradigms in MEMS
MEMS and NEMS Architecture
Fundamentals of MEMS Fabrication
Introduction and Description of Basic Processes
Microfabrication and Micromachining of ICs, Microstructures, and Microdevices
Devising and Synthesis of MEMS AND NEMS
MEMS Motion Microdevices Classifier and Synthesis
Nanoelectromechanical Systems
Modeling of Micro- and Nanoscale Electromechanical Systems, Devices, and Structures
Introduction to Modeling, Analysis, and Simulation
Electromagnetics and its Application for MEMS and NEMS
Induction Micromachines
Synchronous Microtransducers
Microscale Permanent-Magnet Stepper Micromotors
Piezotransducers
Fundamentals of Modeling of Electromagnetic Radiating Energy Microdevices
Classical Mechanics and its Application
Thermoanalysis and Heat Equation
Nanosystems, Quantum Mechanics, and Mathematical Models
Atomic Structures and Quantum Mechanics
Molecular and Nanostructure Dynamics
Molecular Wires and Molecular Circuits
Control of Microelectromechanical Systems
Introduction to Microelectromechanical Systems Control
Lyapunov Stability Theory
Control of Microelectromechanical Systems
Intelligent Control of MEMS
Hamilton-Jacobi Theory and Quantum Mechanics
Case Studies: Synthesis, Analysis, Fabrication, and Computer-Aided Design of MEMS
Introduction
Design and Fabrication
Analysis of Translational Microtransducers
Single-Phase Reluctance Micromotors: Modeling, Analysis, and Control
Three-Phase Synchronous Reluctance Micromotors
Microfabrication
Magnetization Dynamics of Thin Films
Microstructures and Microtransducers With Permanent Magnets: Micromirror Actuators
Reluctance Electromagnetic Micromotors
Micromachined Polycrystalline Silicon Carbide Micromotors
Axial Electromagnetic Micromotors
Synergetic Computer-Aided Design of MEMS
Index

Each chapter also includes a References section.

Keywords: Nanoscience, Nanotechnology

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Reviews

"This book … provides an excellent introduction to MEMS and NEMS systems, devices, structures, and fabrication. …its main strength is in the mathematical models derived for the various devices covered in the text. …[It includes] a good overview of practical technology currently in use. …The book is an excellent place to begin studying MEMS and NEMS."
-IEEE Electrical Insulation Magazine, Vol. 20, No. 4, July/Aug. 2004