1st Edition

Magneto Luminous Chemical Vapor Deposition

By Hirotsugu Yasuda Copyright 2011
284 Pages 153 B/W Illustrations
by CRC Press

284 Pages 153 B/W Illustrations
by CRC Press

268 Pages
by CRC Press

The magneto luminous chemical vapor deposition (MLCVD) method is the perfect example of the "front-end green process." It employs an entirely new process that expends the minimum amount of materials in gas phase, yields virtually no effluent, and therefore requires no environmental remediation. Unlike the "back-end green process," which calls for add-on processes to deal with effluent problems,... Read more

Introduction

Context of Term Used and Notion
Plasma
Electric Discharge of Gas
Gas Phase
Polymerization & Material Formation
Surface & Interface
Bio-Compatibility

Green Deposition Coating of Nano Films
Front-End Approach & Rear-End Approach in Green Processing
Low Pressure MLCVD Coati
Layer-By-Layer (LBL) Coating
Cost of Coating Processes
System Approach Interface Engineering with Green Processes
System Approach Interface Engineering for Corrosion Protection
Green System Approach Interface Engineering by Magneto-Luminous CVD

Plasma Phase and Luminous Gas Phase
Plasma Phase
Luminous Gas Phase

Dielectric Breakdown of Gas Phase
Significance of Dielectric Breakdown of Gas on Luminous Chemical Vapor Deposition
Breakdown of Non-Deposition Gas & Deposition Gas
Source of Electrons for Electron Avalanche to Cause Gas Phase Breakdown
Interfacial Electron Transfer
Experimental Examination of Gas Phase Breakdown
Factors That Control the Transformation of Gas Phase
Electron Negativity of Atoms & EFFICIENCY OF ELECTRON-IMPACT REACTIONS
Gas Phase Breakdown as Functions of the System Parameters

Influence of Magnetic Field on Luminous Gas Phase
Influence of Magnetic Field on Roles of Electrons
Shaping of Negative Glow near The Magnetron Anode
Influence of Magnetic Field on the Dielectric Breakdown Process
Electrons in Electric Field and in Magnetic Field
Implications of Magnetron Gas Phase Breakdown
Magnetic Field Initiation of Luminous Gas Phase

Polymer Formation Mechanism in Luminous Gas
Free-Radical Polymerization & Free-Radical Polymer Formation in Luminous Gas Phase
Repeating Step Growth Polymerization (RSGP) Mechanism
Competitive Ablation & Polymerization (CAP) Principle
Influence of Un-Accounted Factors
Dissociation of Monomer Molecules
Dependence of Polymer Formation on Operation Parameters

Operation Parameters & Deposition Kinetics
Operation Parameters & Plasma Polymerization Processes
Deposition Kinetics
Properties of Plasma Polymers and Domains of Plasma Polymerization
Partition of Deposition on Electrode and Deposition on Surface in Gas

Magneto-Luminous Chemical Vapor Deposition
Domain of MLCVD
Toroidal Glow Surface without Deposition
Confined Luminous Gas Phase in Low-Pressure
Polymer Formation and Deposition in Low-Pressure

Applications of Magneto Luminous Chemical Vapor Deposition
Implantation of Imperturbable Surface State on Substrate
MLCVD Nano Film for Bio-Compatibility
Interface Engineering for Adhesion of Coating

Biography

Hirotsugu Yasuda