Introduction
Micromanufacturing: An Introduction, V.K. Jain, Ajay Sidpara, M. Ravisankar, and Manas Das
Challenges in Meso-, Micro-, and Nanomanufacturing, V. Radhakrishnan
Micromachining
Traditional Micromachining
Microturning, R. Balasubramaniam and Vinod Kumar Suri
Microgrinding, P.V. Rao and S. Ghosh
Advanced Micromachining
Biomachining—Acidithiobacillus-Genus-Based Metal Removal, Hong Hocheng, Jei-Heui Chang, and Umesh U. Jadhav
Micro- and Nanomanufacturing by Focused Ion Beam, Vishwas N. Kulkarni, Neeraj Shukla, and Nitul S. Rajput
Nanofinishing
Magnetorheological and Allied Finishing Processes, Ajay Sidpara and V.K. Jain
Magnetic Abrasive Finishing (MAF), D.K. Singh, S.C.Jayswal, and V.K. Jain
Abrasive Flow Finishing (AFF) for Micromanufacturing, M. Ravisankar, J. Ramkumar, and V.K. Jain
Microjoining
Laser Microwelding, N.J. Vasa
Electron Beams for Macro- and Microwelding Applications, D.K. Pratihar, V. Dey, A.V. Bapat, and K. Easwaramoorthy
Microforming
Micro- and Nanostructured Surface Development by Nano Plastic Forming and Roller Imprinting, M. Yoshino, K. Willy, A. Yamanaka, T. Matsumura, S. Aravindan, and P.V. Rao
Microextrusion, U.S. Dixit and R. Das
Microbending with Laser, U.S. Dixit, S.N. Joshi, and V. Hemanth Kumar
Miscellaneous
Dimensional Metrology for Micro/Mesoscale Manufacturing, Shawn P. Moylan
Micromolding—A Soft Lithography Technique, B. Radha and G.U. Kulkarni
Fabrication of Microelectronic Devices, Monica Katiyar, Deepak, and Vikram Verma
An Integrated Wafer Surface Evolution Model for Chemical Mechanical Planarization (CMP), Abhijit Chandra, Ashraf F. Bastawros, Xiaoping Wang, Pavan Karra, and Micayla Haugen
Index
Biography
V.K. Jain
"Coverage is quite comprehensive … A useful book … comprehensive."
—A Y C Nee, National University of Singapore
