1st Edition
Microscopy of Semiconducting Materials 1999 Proceedings of the Institute of Physics Conference held 22-25 March 1999, University of Oxford, UK
772 Pages
by
CRC Press
774 Pages
by
CRC Press
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With IC technology continuing to advance, the analysis of very small structures remains critically important. Microscopy of Semiconducting Materials provides an overview of advances in semiconductor studies using microscopy. The book explores the use of transmission and scanning electron microscopy, ultrafine electron probes, and EELS to investigate semiconducting structures. It also covers... Read more
High Resolution Microscopy and Microanalysis (10 papers)
Dislocations and Boundaries (9 papers)
Self-Organized and Quantum Domain Structures (14 papers)
Epitaxy-Growth Phenomena (22 papers)
Epitaxy-Defect Formation (16 papers)
Epitaxy-Wide Band-Gap Nitrides (20 papers)
Processed Silicon and Related Materials (24 papers)
Metallization, Silicides, and Contacts (9 papers)
Device Studies and Specimen Preparation (7 papers)
Scanning Probe Microscopy (6 papers)
Advanced Scanning Electron and Optical Microscopy (20 papers)
Dislocations and Boundaries (9 papers)
Self-Organized and Quantum Domain Structures (14 papers)
Epitaxy-Growth Phenomena (22 papers)
Epitaxy-Defect Formation (16 papers)
Epitaxy-Wide Band-Gap Nitrides (20 papers)
Processed Silicon and Related Materials (24 papers)
Metallization, Silicides, and Contacts (9 papers)
Device Studies and Specimen Preparation (7 papers)
Scanning Probe Microscopy (6 papers)
Advanced Scanning Electron and Optical Microscopy (20 papers)
Biography
A.G Cullis, R Beanland
