1st Edition
Modeling and Control of Precision Actuators
Introduction
Growing Interest in Precise Actuators
Types of Precise Actuators
Applications of Precise Actuators
Nonlinear Dynamics and Modeling
Hysteresis
Creep
Friction
Force Ripples
Identification and Compensation of Preisach Hysteresis in Piezoelectric Actuators
SVD-Based Identification and Compensation of Preisach Hysteresis
High-Bandwidth Identification and Compensation of Hysteretic Dynamics in Piezoelectric Actuators
Concluding Remarks
Identification and Compensation of Friction and Ripple Force
Relay Feedback Techniques for Precision Motion Control
Identification and Compensation of Friction Model
Modeling and Compensation of Ripples and Friction in Permanent Magnet Linear Motors
Model Predictive Control of Precise Actuators
Model Predictive Control Concepts for Motion Tracking
Hybrid MPC for Ultrasonic Motors
From Parametric MPC to PID Gain Scheduling Controllers
Simulation Study and Experiment Results
Concluding Remarks
Modeling and Control of Air Bearing Stages
Problem Statements
Control of Linear Air Bearing Stage
Controller Design for the System
Experimental Results
Control of Spherical Air Bearing Stage
Performance Analysis of Spherical Air Bearing System
Concluding Remarks
Fault Detection and Accommodation in Actuators
Problem Statements
Types of Failure
Fault Diagnosis Scheme
Control of the System under No Fault Condition
Accommodation Control After Fault Detection
Extension to Output Feedback Control Design
Experimental Tests
Concluding Remarks
Case Studies of Precise Actuator Applications
Robust Adaptive Control of Piezoelectric Actuators with an Application to Intracytoplasmic Sperm Injection
Control of a 2-DOF Ultrasonic Piezomotor Stage for Grommet Insertion
Vision-Based Tracking and Thermal Monitoring of Non-Stationary Targets
Biography
Tan Kok Kiong, ; Sunan, Huang






