While many books are dedicated to individual aspects of nanofabrication, there is no single source that defines and explains the total vision of the field. Filling this gap, Nanofabrication Handbook presents a unique collection of new and the most important established approaches to nanofabrication. Contributors from leading research facilities and academic institutions around the world define subfields, offer practical instructions and examples, and pave the way for future research.
Helping readers to select the proper fabricating technique for their experiments, the book provides a broad vision of the most critical problems and explains how to solve them. It includes basic definitions and introduces the main underlying concepts of nanofabrication. The book also discusses the major advantages and disadvantages of each approach and offers a wide variety of examples of cutting-edge applications.
Each chapter focuses on a particular method or aspect of study. For every method, the contributors describe the underlying theoretical basis, resolution, patterns and substrates used, and applications. They show how applications at the nanoscale require a different process and understanding than those at the microscale. For each experiment, they elucidate key solutions to problems relating to materials, methods, and surface considerations.
A complete resource for this rapidly emerging interdisciplinary field, this handbook provides practical information for planning the experiments of any project that employs nanofabrication techniques. It gives readers a foundation to enter the complex world of nanofabrication and inspires the scientific community at large to push the limits of nanometer resolution.
Table of Contents
STANDARD LITHOGRAPHY: Introduction to Nanofabrication. Electron Beam Lithography. Nanolithography with Focused Ion Beams. Focused Ion Beam and Electron Beam Deposition. Plasma-Assisted Pattern Transfer at the Nanoscale. Optical Lithography. Soft X-Ray Lithography. Simulations in Micro- and Nanofabrication. NEW LITHOGRAPHIC TECHNIQUES: Nanoimprint Lithography. Scanning Probe Lithography. Two-Photon Lithography. Colloidal Inorganic Nanocrystals: Synthesis and Controlled Assembly. Directed Self Assembly. Self-Assembled DNA Nanostructures and DNA Devices. Emerging New Approaches. NANOFABRICATION APPLICATIONS: Nano-Electro-Mechanical Systems (NEMS). Micro- and Nanofluidics. Fabrication of Nanophotonic Structures. Patterning Magnetic Nanostructures with Ions. Plasmonic Metamaterials. Nanoelectronics. Manipulation and Nanostructuring for Biological Applications.
Stefano Cabrini is director of the Nanofabrication Facility and member of the interfacility nanophotonics group and the "single digit nano fabrication" theme in the Molecular Foundry (a U.S. Department of Energy program) at the Lawrence Berkeley National Laboratory. His research interests include nanophotonics and metamaterials, semiconductor device fabrication, optical device fabrication, MEMS fabrication, and the development of new lithographic tools and processes.
Satoshi Kawata is a professor of applied physics at Osaka University, chairman of Nanophoton Corp., and chief scientist of the Nanophotonics Laboratory at RIKEN. A fellow of the Optical Society of America, SPIE, and Institute of Physics, Dr. Kawata has been a recipient of the Medal of Purple Ribbon from the Japanese Emperor; the Science and Technology Award from the Japanese Ministry of Education, Culture, Sports, Science and Technology; the Da Vinci Award of Excellence from LMVH Moët Hennessy Louis Vuitton; and the Japan IBM Science Award. His research interests include nanophotonics, biophotonics, plasmonics, metamaterials, photonic crystals, and nanofabrication through two-photon absorption techniques.