The Evolution of Silicon Electronics
Introduction
The Early Days of Semiconductor Electronics
Moore’s Law
Further trends and the ITRS
Improved MOSFET Designs
MOSFETs for High-Frequency Operation?
MOSFET Theory
Introduction
MOS Fundamentals
MOSFET Current— Voltage Characteristics
Nanoscale MOSFETs
MOSFET Scaling Theory
Nanoscale MOSFET Concepts — An Overview
Nanoscale Bulk MOSFETs
Mobility Enhancement Techniques
High-k Dielectrics and Metal Gates
Nanoscale Single-Gate SOI MOSFETs
Nanoscale Multiple-Gate MOSFETs
MOSFETs with Alternative Channel Materials
The Effect of Multiple Technology Boosters
MOSFETs for RF Applications
Introduction
RF Transistor Figures of Merit
Small-Signal Equivalent Circuits
RF MOSFET Design and Performance
Overview of Nanometer CMOS Technology
Introduction
Lithography
Plasma Etching
Thin Film Formation Techniques
Junction Formation
Interconnects
Summary
Outlook
Introduction
Critical Scaling Issues
Will There Be a Mainstream Beyond-Scaling, Post-CMOS Technology?
Appendix A: Frequently Used Symbols
Appendix B: Physical Constants and Unit Conversions
Appendix C: Important Properties of Si and SiO₂
Appendix D: Carrier Concentrations, Energy, and Potential
Appendix E: Frequently Used Abbreviations
Biography
Juin J Liou, Frank Schwierz, Hei Wong
"Nanoscale CMOS has become mainstream technology. This book deals with a very important topic and is written by two well-known contributors to the field. It is a very timely and important book."
—Prof. Michael Shur, Rensselaer Polytechnic Institute, USA
"This book combines the knowledge of three distinguished authors in a unique blend transcending from early history to modern-day nanotechnology; the text will be enjoyable, educational and illuminating for the technical novice and the modern expert."
—Dr. Steven Voldman, ESD Association, USA
