Novel Nanocomposite Coatings Advances and Industrial Applications

Synthesis of New Nanostructured Materials
Nanocrystalline Materials
Multilayers and Superlattices
Nanocomposite Films

Thin Film Processing
Principles of Plasma Discharges
Physical Sputtering and Transport of Sputtered Material
Sputter Deposition Techniques. Reactive Sputter Deposition

Film Formation and Structure
of Sputtered Material
Interface Formation
Nucleation and Growth
Microstructure of Thin Films, Structure Zone Models, Advantages and Limitations of Sputter Deposition Processes
Structure-Property Relation in Hard Films

Me-Si-N Films With a Low and Intermediate Si Content
Structure, Morphology and Phase Composition Hardness and Macrostress Oxidation Resistance Problems with Reproducibility

Novel nanocomposite films - Zr-Si-N Films with a High Si Content
Deposition Rate
Elemental Composition
Chemical Bonding and Phase Composition
Electrical and Optical Properties
Structure. Morphology
Surface Roughness
Mechanical Properties
Macrostress
Effect of Substrate Bias
Thermal Stability
Oxidation Resistance

High Si-containing W-Si-N Nanocomposite Films
Deposition Rate
Elemental Composition
Chemical Bonding and Phase Composition
Structure
Morphology
Surface Roughness
Mechanical Properties
Macrostress
Oxidation Resistance

Characterization of Thin Films.
Mechanical Properties
X-Ray Diffraction Analysis
Stress Measurement
Film Thickness Measurement
Scanning Electron Microscopy
Energy Dispersive X-Ray Spectrometry
Differential Scanning Calorimetry
Thermogravimetric Analysis

Biography

Rostislav Daniel is associate professor at the Department of Physical Metallurgy and Materials Testing, University of Leoben, Austria. He received his MSc in applied sciences and computer engineering, applied physics and physical engineering and PhD in applied sciences and computer engineering, plasma physics and physics of thin films at the University of West Bohemia. His main research areas are plasma physics and physics of thin films, synthesis of advanced hard nanocrystalline and nanocomposite thin films of optimized structures and physical properties, advanced structural characterization of solids, characterization of mechanical properties of thin films and bulk solids, measurements of residual stresses in thin films by optical and x-ray diffraction techniques, investigations of thermo-mechanical properties of thin films and bulk solids, study of thermal stability and oxidation resistance of thin films and bulk solids, and coating design and architecture.

Jindřich Musil is professor of applied physics at the University of West Bohemia, Plzeň, Czech Republic. He received his MSc in electrical engineering at the Military Technical University, Brno, Czech Republic; PhD in physics and mathematics at Czechoslovak Academy of Sciences, Prague, Czech Republic; and DSc in physics and mathematics at Czechoslovak Academy of Sciences, Prague, Czech Republic. His main research areas are electromagnetic field, propagation of electromagnetic waves, microwave plasma discharges, plasma physics, thermonuclear fusion, lasers, plasma chemistry and physics of thin films, PVD and PACVD of thin films, high-rate pulsed reactive magnetron sputtering, and development of new technological processes and advanced systems for synthesis of novel hard and functional nanocomposite coatings.