Optical Inspection of Microsystems: 1st Edition (Paperback) book cover

Optical Inspection of Microsystems

1st Edition

Edited by Wolfgang Osten

CRC Press

503 pages | 479 B/W Illus.

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Description

Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands.

Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moiré techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts.

Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.

Reviews

“The editor of this book has been working in the field of optical metrology for most of his career, so it is no surprise that he has edited a well-balanced and up-to-date picture of the most important optical measurement techniques used for microcomponents inspections. The book describes the basic principles of image correlation, light scattering, atomic force microscopy, moiré methods, grating interferometry, interference microscopy, laser Doppler vibrometry, digital holography, speckle metrology, and spectroscopic techniques, and also their major application for Microsystems testing. … Each chapter includes a reasonable number of references. This book is a welcome addition to the literature on optical inspection. It is an excellent value for any graduate student, application engineer, research laboratory and group working in this field, and also for those who are contemplating using these techniques to solve a specific problem.”

— Guillermo H. Kaufmann, Instituto de Fisica Rosario, Argentina, in OPN Optics & Photonics News, Vol. 18, No.3, March 2007

Table of Contents

Image Processing and Computer Vision for MEMS Testing; Markus Hüttel

Introduction

Classification of Tasks

Image Processing and Computer Vision Components

Processing and Analysis of Image Data

Commercial and Noncommercial Image Processing and Computer Vision Software

Image Processing Techniques for the Processing of Fringe Patterns in Optical Metrology

Conclusion

References

Image Correlation Techniques for Microsystems Inspection; Dietmar Vogel and Bernd Michel

Introduction

Deformation Measurement by Digital Image Correlation (DIC) Techniques

Base Equipment for DIC Applications

Applications of DIC Techniques to Microsystems

Conclusions and Outlook

References

Light Scattering Techniques for the Inspection of Microcomponents and Microstructures; Angela Duparré

Introduction

Theoretical Background of Light Scattering

Measurement Equipment

Standardization of Light Scattering Methods

Applications for Microcomponent and Microstructure Inspection

Combination of Light Scattering and Profilometric Techniques

Conclusions and Outlook

References

Characterization and Measurement of Microcomponents with the Atomic Force Microscope (AFM); F. Michael Serry and Joanna Schmit

Introduction

Components of AFM and Principles of AFM Operation

AFM Imaging Modes

AFM Nonimaging Modes

Applications of AFM for Microcomponent Inspection: A Case Study

Atomic Force Profilometer (AFP) — A Combination of AFM and Stylus Profiler

Optical Metrology Complementary to AFM

Conclusions and Outlook

References

Optical Profiling Techniques for MEMS Measurement; Klaus Körner, Aiko Ruprecht, and Tobias Wiesendanger

Introduction

Principles of Confocal Microscopy

Principle of Microscopic Depth-Scanning Fringe Projection (DSFP)

Conclusion

References

Grid and Moiré Methods for Micromeasurements; Anand Asundi, Bing Zhao, and Huimin Xie

Introduction

Grid or Grating Fabrication Methods

Micro-Moiré Interferometer

Moiré Methods Using High-Resolution Microscopy

Microscopic Grid Methods

Conclusions

References

Grating Interferometry for In-Plane Displacement and Strain Measurement of Microcomponents; Leszek Salbut

Introduction

Principle of Grating Interferometry

Waveguide Grating Interferometry

Measurement System

SG Technology

Exemplary Applications of WGI

Conclusions

References

Interference Microscopy Techniques for Microsystem Characterization; Alain Bosseboeuf and Sylvain Petitgrand

Introduction

Interference Microscopes

Modeling of Two-Beam Homodyne Interference Microscopes

Static Measurements by Interference Microscopy

Performance and Issues of Interference Microscopy

Applications of Interferometric Profilometers in the MEMS Field

Dynamic Measurements by Interference Microscopy

Conclusion

Acknowledgments

References

Measuring MEMS in Motion by Laser Doppler Vibrometry; Christian Rembe, Georg Siegmund, Heinrich Steger, and Michael Wörtge

Introduction

Laser Doppler Effect and Its Interferometric Detection

Techniques of Laser Doppler Vibrometry

Full-Field Vibrometry

Measuring on Microscopic Structures

Resolution and Accuracy

Combination with Other Techniques

Examples

Conclusion and Outlook

References

An Interferometric Platform for Static, Quasi-Static, and Dynamic Evaluation of Out-Of-Plane Deformations of MEMS and MOEMS; Christophe Gorecki, Michal Jozwik, and Patrick Delobelle

Introduction

Interferometric Platform Architecture and Principle of Operation

Optomechanical Characterization of Membranes by “Pointwise” Deflection Method

Mechanical Expertise of Scratch Drive Actuators via Interferometric Measurement of Out-of-Plane Microdisplacements

Dynamic Evaluation of Active MOEMS by Interferometry Using Stroboscopic Technique

General Conclusion and Outlook

Acknowledgments

References

Optoelectronic Holography for Testing Electronic Packaging and MEMS; Cosme Furlong

Introduction

Overview of MEMS Fabrication Processes

Optoelectronic Holography

Representative Applications

Summary

Acknowledgments

References

Digital Holography and Its Application in MEMS/MOEMS Inspection; Wolfgang Osten and Pietro Ferraro

Introduction

Theory and Basic Principle of Digital Holography (DH)

Digital Holographic Interferometry

Digital Holographic Microscopy (DHM)

The Application of DH to the Investigation of Microcomponents

Conclusion

References

Speckle Metrology for Microsystem Inspection; Roland Höfling and Petra Aswendt

Introduction

Basics

Applications

Conclusion

References

Spectroscopic Techniques for MEMS Inspection; Ingrid De Wolf

Introduction

Raman Spectroscopy (RS)

Spectroscopic Ellipsometry (SE)

Dual-Beam Spectroscopy (DBS)

X-Ray Photoelectron Spectroscopy (XPS)

High-Resolution Electron Energy Loss Spectroscopy (HREELS)

Auger Electron Spectroscopy (AES)

Brillouin Scattering (BS)

Conclusions

References

Index

About the Authors/Editor

Osten, Wolfgang

Subject Categories

BISAC Subject Codes/Headings:
SCI053000
SCIENCE / Optics
TEC007000
TECHNOLOGY & ENGINEERING / Electrical
TEC008070
TECHNOLOGY & ENGINEERING / Electronics / Microelectronics
TEC019000
TECHNOLOGY & ENGINEERING / Lasers & Photonics