This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoelectromechanical (NEMS) with nanophotonic elements is creating powerful new photonic devices and systems including MEMS micromirrors, MEMS tunable filters, MEMS-based adjustable lenses and apertures, NEMS-driven variable silicon nanowire waveguide couplers, and NEMS tunable photonic crystal nanocavities. The book also addresses system applications in laser scanning displays, endoscopic systems, space telescopes, optical telecommunication systems, and biomedical implantable systems.
- Presents efforts to scale down mechanical and photonic elements into the nano regime for enhanced performance, faster operational speed, greater bandwidth, and higher level of integration.
- Showcases the integration of MEMS and optical/photonic devices into real commercial products.
- Addresses applications in optical telecommunication, sensing, imaging, and biomedical systems.
Prof. Vincent C. Lee is Associate Professor in the Department of Electrical and Computer Engineering, National University of Singapore.
Prof. Guangya Zhou is Associate Professor in the Department of Mechanical Engineering at National University of Singapore.
Table of Contents
Section I Optical MEMS for communication, imaging, and sensing applications
1 Optical MEMS: An introduction
Guangya Zhou and Chengkuo Lee
2 MEMS optical scanners for laser projection display
3 Optical micro-electrical-mechanical phased array
Youmin Wang and Ming-Chiang Wu
4 Optical MEMS for space: Design, characterization, and applications
5 MEMS vibratory grating scanners and their applications
6 F–P filters and applications in spectrometers and gas sensing
Chong Pei Ho and Chengkuo Lee
7 Electrothermally actuated MEMS mirrors: Design, modeling, and applications
Huikai Xie, Xiaoyang Zhang, Liang Zhou, and Sagnik Pal
8 MEMS tunable optics: Liquid and solid methods
Yongchao Zou and Guangya Zhou
Section II Nanophotonics for communication, imaging, and sensing applications
9 Physical sensors based on photonic crystals
Bo Li and Chengkuo Lee
10 Silicon photonic variable waveguide coupler devices
11 Metasurface and ultrathin optical devices
Xianzhong Chen, Dandan Wen, and Fuyong Yue
12 Optical micro- and nanoresonators for biochemical sensing
Xingwang Zhang, Liying Liu, Lei Xu, Xudong Fan, and Guangya Zhou
13 Terahertz MEMS metamaterials
Prakash Pitchappa and Chengkuo Lee
Section III Biomicro- and nanophotonics and optofluidics for health care applications
14 Optofluidic devices and their applications
15 Implantable CMOS microphotonic devices
Jun Ohta and Takashi Tokuda
16 Microfluidic photocatalysis
Ning Wang and Xuming Zhang
Prof. Guangya Zhou received the B.Eng. and Ph.D. degrees in optical engineering from Zhejiang University, Hangzhou, China. His PhD thesis was on micro optics and diffractive optics. He was a post-doctoral fellow at state key laboratory of thin film and microfabrication technology at Shanghai Jiao Tong University conducting research on optical MEMS for telecommunication systems. He has been a research fellow at the School of Electrical and Electronic Engineering at Nanyang Technological University. He is now an associate professor in the Department of Mechanical Engineering, National University of Singapore. His research covers optical MEMS scanners, MEMS spectrometers and hyperspectral imagers, optical MEMS based ultra-compact endoscope probes, silicon nanophotonics, NEMS tunable photonic crystals, and nano scale optomechanics. He has published about 90 research papers in peerreviewed international journals, and is the main inventor of the MEMS-driven vibratory grating scanner, MEMS-based miniature zoom lens system with autofocus function, and miniature MEMS-based adjustable aperture. The latter two were successfully licensed to a start-up company, where he currently works as a technical advisor.
Prof. Vincent C. Lee received his PhD from The University of Tokyo in 1996. He has served as JST Research Fellow at AIST, MITI of Japan, Senior Research Staff Member of the Microsystems Laboratory, Industrial Technology Research Institute, Hsinchu, Manager of the MEMS Device Division of Metrodyne Microsystem Corporation, Hsinchu, Adjunct Assistant Professor with the Electro-Physics Department, National Chiao Tung University, Hsinchu, and Adjunct Assistant Professor with the Institute of Precision Engineering, National Chung Hsing University, Taichung, Taiwan. He cofounded Asia Pacific Microsystems, Inc., Hsinchu, where he was a Vice President, and also was a Senior Member of the Technical Staff at the Institute of Microelectronics, A*STAR, Singapore. Currently, he is an Associate Professor with the Department of Electrical and Computer Engineering, National University of Singapore, Singapore. He is the co-author of Advanced MEMS Packaging (McGraw-Hill, 2010). He has contributed to more than 230 international conference papers and extended abstracts and 160 peer-reviewed international journal articles in the fields of Optical MEMS, NEMS, nanophotonics and nanotechnology. He holds nine U.S. patents.