This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed.
Forming Directed Fluxes of Low Temperature Plasma with High Voltage Gas Discharge Outside the Electrode Gap. Overview of Devices Used for Generating Low-Temperature High Voltage Gas-Discharge Plasma. Features of Low-Temperature Off-Electrode Plasma Generated by High Voltage Gas Discharge. Design Changes to the High-Voltage Gas-Discharge Device. New Devices for Generating Directed Fluxes of Low-Temperature Off Electrode Plasma. Multibeam Gas-Discharge Plasma Generator. Chapter Summay. Methods for Quickly Measuring Surface Cleanliness. Overview of Methods for Quickly Measuring Surface Cleanliness. The Method of Frustrated Multiple Internal Reflection Spectroscopy. The Method of Measuring the Volta Potential. Methods for Evaluating Cleaning Efficiency Based. On Wettability of the Substrate Surface. The Tribometric Method. Design Changes to the Tribometer. Operating Regimes and Parameters of the Tribometer. Determining the Evaluation Criterion of a Technologically Clean Surface. Tribometric Effect of the Substrate-Probe on the Structure of the Test Surface. Measuring Surface Cleanliness with the Tribometric Method . A Cleanliness Analyser Based on Analysis Of Drop Behavior. Evaluating the Cleanliness of a Substrate from the Dynamic State Of a Liquid Drop Deposited on Its Surface. Specifications of the Micro- and Nanoroughness Analyser. Design Changes to the Micro- and Nanoroughness Analysis. Chapter Summary. Increasing the Degree of Surface Cleanliness with Low-Temperature off Electrode Plasma. Overview of Methods for Surface Cleaning. Chemical Cleaning. Laser Cleaning. Low-Temperature Plasma Cleaning. Formation Mechanisms of Surface Properties. Molecular Structure Analysis of the Organic Contaminant. Preparing Initial Samples with a Given Degree of Contamination. Analysis of Plasma Particles Impinging on the Surface Being Treated. Mechanism of Surface Cleaning with Directed Fluxes of Low-Temperature Off-Electrode Plasma. Cleaning Mechanisms. Cleaning Model—Primary E