Particle Control for Semiconductor Manufacturing: 1st Edition (Hardback) book cover

Particle Control for Semiconductor Manufacturing

1st Edition

By Donovan

CRC Press

480 pages

Purchasing Options:$ = USD
Hardback: 9780824782429
pub: 1990-01-26
$335.00
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eBook (VitalSource) : 9780203744307
pub: 2018-05-04
from $167.50


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Description

There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In

Subject Categories

BISAC Subject Codes/Headings:
TEC008000
TECHNOLOGY & ENGINEERING / Electronics / General