Particle Control for Semiconductor Manufacturing  book cover
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1st Edition

Particle Control for Semiconductor Manufacturing




ISBN 9780824782429
Published January 26, 1990 by CRC Press
480 Pages

 
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Book Description

There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In