502 Pages
by
CRC Press
502 Pages
by
CRC Press
502 Pages
by
CRC Press
Also available as eBook on:
Photonic MEMS devices represent the next major breakthrough in the silicon revolution. While many quality resources exist on the optic and photonic aspect of device physics, today’s researchers are in need of a reference that goes beyond to include all aspects of engineering innovation. An extension on traditional design and analysis, Photonic MEMS Devices: Design, Fabrication, and... Read more
Photonic MEMS Devices and Actuators. MEMS Device Control. Optical MEMS and Devices. Micro and Nano Fabrication Techniques.
Biography
Liu, Ai-Qun
